Browsing by author "Ackaert, J."
Now showing items 1-5 of 5
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Antenna test structure matrix description, application for optimized HDP oxide deposition, metal etch, Ar preclean and passivation processing in sub-half micron CMOS processing
Ackaert, J.; de Backer, E.; Coppens, P.; Creusen, Martin (1999) -
Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide
Zhichun, Wang; Ackaert, J.; Salm, C.; de Backer, E.; Van den Bosch, Geert; Zawalski, Wade (2002) -
Impact of plasma density and pattern aspect ratio on plasma damage in deep submicron CMOS technologies
Creusen, Martin; Van den bosch, G.; van der Groen, Sonja; Groeseneken, Guido; Ackaert, J.; De Backer, E. (1999) -
Impact of reactor- and transistor-type on electron shading
Creusen, Martin; Ackaert, J.; De Backer, E.; Groeseneken, Guido (1999) -
Plasma damage in HIMOSTM non-volatile memories (NVM)
Ackaert, J.; Lowe, A.; De Backer, E.; Boonen, S.; Yao, T.; Van Houdt, Jan; Haspeslagh, Luc (2004-05)