Browsing by author "Marinov, Daniil"
Now showing items 1-16 of 16
-
2D materials: roadmap to CMOS integration
Huyghebaert, Cedric; Schram, Tom; Smets, Quentin; Agarwal Kumar, Tarun; Verreck, Devin; Brems, Steven; Phommahaxay, Alain; Chiappe, Daniele; El Kazzi, Salim; Lockhart de la Rosa, Cesar Javier; Arutchelvan, Goutham; Cott, Daire; Ludwig, Jonathan; Gaur, Abhinav; Sutar, Surajit; Leonhardt, Alessandra; Marinov, Daniil; Lin, Dennis; Caymax, Matty; Asselberghs, Inge; Pourtois, Geoffrey; Radu, Iuliana (2018) -
3D FinFET gate etch for advanced CMOS scaling
Dupuy, Emmanuel; Altamirano Sanchez, Efrain; Marinov, Daniil; Hody, Hubert; Mertens, Hans; Siew, Yong Kong; Demuynck, Steven; Horiguchi, Naoto (2019) -
A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
Heyne, Markus; Marinov, Daniil; Braithwaite, Nicholas; Goodyear, Andy; de Marneffe, Jean-Francois; Cooke, Mike; Radu, Iuliana; Neyts, Erik C.; De Gendt, Stefan (2019) -
Ar and H2 plasma and neutral/ion beam treatment of EUV resist
De Schepper, Peter; Marinov, Daniil; El Otell, Ziad; Altamirano Sanchez, Efrain; de Marneffe, Jean-Francois; De Gendt, Stefan; Braithwaite, Nicholas St. J. (2015-03) -
Challenges of large area integration of 2D materials in CMOS line
Huyghebaert, Cedric; Schram, Tom; Smets, Quentin; Chiappe, Daniele; Asselberghs, Inge; Brems, Steven; Verguts, Ken; Marinov, Daniil; Pantouvaki, Marianna (2018) -
Development and characterization of a fast neutral beam source for damage-free etching
Marinov, Daniil; El Otell, Ziad; Bowden, Mark; Braithwaite, Nicholas (2014) -
Development of a novel wafer probe for in-situ measurements
El Otell, Ziad; Marinov, Daniil; Bowden, Mark; Samara, Vladimir; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas (2013) -
Development of a novel wafer probe for in-situ measurements
El Otell, Ziad; Marinov, Daniil; Samra, Vladimir; Bowden, Mark; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas (2014) -
Development of a novel wafer-probe for in situ measurements of thin film properties
El Otell, Ziad; Marinov, Daniil; Samara, Vladimir; Bowden, Mark; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas St. J. (2015) -
Dry cleaning and doping of MX2 for contact engineering
Marinov, Daniil; Ludwig, Jonathan; Chiappe, Daniele; Voronina, Ekaterina; Rakhimova, Tatyana; de Marneffe, Jean-Francois; Asselberghs, Inge; De Gendt, Stefan (2018) -
Dry cleaning of WS2 using reducing downstream plasma
de Marneffe, Jean-Francois; Marinov, Daniil; Zhang, Jianran; With, Patrick; Smets, Quentin; Arutchelvan, Goutham; Voronina, E.; Mankelevitch, Yuri; Rakhimova, Tatyana; Bal, Kristof; Asselberghs, Inge; De Gendt, Stefan (2019) -
Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
Marinov, Daniil; El Otell, Ziad; Bowden, Mark; Braithwaite, Nicholas (2015) -
High performance strained Germanium Gate All Around p-channel devices with excellent electrostatic control for sub-30 nm Lg
Capogreco, Elena; Arimura, Hiroaki; Vohra, Anurag; Porret, Clément; Loo, Roger; De Keersgieter, An; Dupuy, Emmanuel; Marinov, Daniil; Hikavyy, Andriy; Sebaai, Farid; Mannaert, Geert; Ragnarsson, Lars-Ake; Siew, Yong Kong; Vrancken, Christa; Opdebeeck, Ann; Mitard, Jerome; Langer, Robert; Altamirano Sanchez, Efrain; Holsteyns, Frank; Demuynck, Steven; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine; Horiguchi, Naoto (2019) -
Kinetic Monte Carlo simulations of plasma-surface reactions on heterogeneous surfaces
Marinov, Daniil (2019) -
Mechanisms of hydrogen atom interactions with MoS2 monolayer
Voronina, Ekaterina; Mankelevitch, Yuri; Novikov, Lev; Rakhimova, Tatyana; Marinov, Daniil; de Marneffe, Jean-Francois (2020) -
Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
Marinov, Daniil; de Marneffe, Jean-Francois; Smets, Quentin; Arutchelvan, Goutham; Bal, Kristof M.; Voronina, Ekaterina; Rakhimova, Tatyana; Mankelevich, Yuri; El Kazzi, Salim; Nalin Mehta, Ankit; Wyndaele, Pieter-Jan; Heyne, Markus Hartmut; Zhang, Jianran; With, Patrick C.; Banerjee, Sreetama; Neyts, Erik C.; Asselberghs, Inge; Lin, Dennis; De Gendt, Stefan (2021)