Browsing by author "Snow, J."
Now showing items 1-6 of 6
-
Aging phenomena in the removal of nano-particles from Si wafers
Vereecke, Guy; Veltens, J.; Xu, Kaidong; Eitoku, A.; Sano, Ken-Ichi; Arnauts, Sophia; Kenis, Karine; Snow, J.; Vinckier, Chris; Mertens, Paul (2008) -
Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe
Sano, K.; Leys, Frederik; Dilliway, Gabriela; Loo, Roger; Mertens, Paul; Snow, J.; Izumi, A.; Eitoku, A. (2008) -
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Wada, Masayuki; Vos, Rita; Claes, Martine; Schram, Tom; Snow, J.; Mertens, Paul; Eitoku, A. (2009) -
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Wada, Masayuki; Vos, Rita; Claes, Martine; Schram, Tom; Snow, J.; Mertens, Paul; Eitoku, Atsuro (2009) -
Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic
Vereecke, Guy; Veltens, T.; Eitoku, A.; Sano, Ken-Ichi; Doumen, Geert; Fyen, Wim; Wostyn, Kurt; Snow, J.; Mertens, Paul (2008) -
Single-wafer wet chemical oxide formation for pre-ALD high-k deposition on 300 mm wafer
Sano, K.; Izumi, A.; Eitoku, A.; Snow, J.; Nyns, Laura; Kubicek, Stefan; Singanamalla, Raghunath; Richard, Olivier; Conard, Thierry; Vos, Rita; Mertens, Paul (2008)