Browsing by author "Creusen, Martin"
Now showing items 1-8 of 8
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Analysing antenna ratio dependence of plasma charging damage with Weibull breakdown statistics
Van den Bosch, Geert; Creusen, Martin; Degraeve, Robin; Kaczer, Ben; Groeseneken, Guido (2000) -
Anomalously weak antenna ratio dependence of plasma process-induced damage
Van den Bosch, Geert; Creusen, Martin; Degraeve, Robin; Kaczer, Ben; Groeseneken, Guido (2000) -
Antenna test structure matrix description, application for optimized HDP oxide deposition, metal etch, Ar preclean and passivation processing in sub-half micron CMOS processing
Ackaert, J.; de Backer, E.; Coppens, P.; Creusen, Martin (1999) -
Impact of plasma density and pattern aspect ratio on plasma damage in deep submicron CMOS technologies
Creusen, Martin; Van den bosch, G.; van der Groen, Sonja; Groeseneken, Guido; Ackaert, J.; De Backer, E. (1999) -
Impact of reactor- and transistor-type on electron shading
Creusen, Martin; Ackaert, J.; De Backer, E.; Groeseneken, Guido (1999) -
Quantitative yield and reliability projection from antenna test results - A case study
Mason, P. W.; Cheung, K. P.; Hwang, D. K.; Creusen, Martin; Degraeve, Robin; Kaczer, Ben (2000) -
Reduction of plasma process induced damage during gate poly etching by using the SiO2 hard maks
Lee, Hean-Cheal; Creusen, Martin; Groeseneken, Guido; Vanhaelemeersch, Serge (1998) -
The effect of plasma damage and different annealing ambients on the generation of latent interface states
Creusen, Martin; Lee, Hean-Cheal; Vanhaelemeersch, Serge; Groeseneken, Guido (1998)