Browsing by author "Nagaswami, Venkat"

Al2O3 surface passivation : electrical characterization using the Quantox tool

Rothschild, Aude; Nishibe, Nishibe; Cui, Jianli; Zhu, Nanchang; Debucquoy, Maarten; Mamagkakis, Stylianos; Nagaswami, Venkat; John, Joachim (2011)

Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns

Pathangi Sriraman, Hari; Gronheid, Roel; Van Den Heuvel, Dieter; Rincon Delgadillo, Paulina; Chan, BT; Van Look, Lieve; Bayana, Hareen; Cao, Yi; Her, YoungJun; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Somervell, Mark; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Nealey, Paul (2014)

Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, YiHoon; Lin, G.; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015)

Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Gronheid, Roel; Rincon Delgadillo, Paulina; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Parnell, Doni; Chan, BT; Lee, Yu-tsung; Van Look, Lieve; Cao, Yi; Her, YoungJun; Lin, Guanyang; Harukawa, Ryoto; Nagaswami, Venkat; D'Urzo, Lucia; Somervell, Mark; Nealey, Paul (2014)