Browsing by author "Guggilla, S."
Now showing items 1-5 of 5
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Barrier reliability of ALD TaN on sub-100 nm copper low-k interconnects
Tokei, Zsolt; Gailledrat, Thomas; Li, Yunlong; Schuhmacher, Jorg; Mandrekar, T.; Guggilla, S.; Mebarki, B.; Maex, Karen (2005) -
Barrier reliability on sub-100nm copper low-k interconnects
Tokei, Zsolt; Gailledrat, T.; Li, Yunlong; Schuhmacher, Jorg; Mandrekar, T.; Guggilla, S.; Mebarki, Bencherki; Maex, Karen (2004) -
Barrier studies on porous silk semiconductor dielectric
Tokei, Zsolt; Iacopi, Francesca; Richard, Olivier; Waeterloos, Joost; Rozeveld, S.; Beach, E.; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003) -
Copper seed layer scaling for advanced interconnects: extendibility of I-PVD
Tokei, Zsolt; Demuynck, Steven; Vervoort, Iwan; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003) -
Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta
Tokei, Zsolt; Kelleher, Deirdre Maria; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003)