Browsing by author "Das, Arabinda"
Now showing items 1-9 of 9
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Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Das, Arabinda; Kokubo, Terukazu; Furukawa, Yukiko; Struyf, Herbert; Vos, Ingrid; Sijmus, Bram; Iacopi, Francesca; Van Aelst, Joke; Le, Quoc Toan; Carbonell, Laure; Brongersma, Sywert; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Sleeckx, Erik; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Rosseel, Erik; Van Hove, Marleen; Vanhaelemeersch, Serge; Shiota, A.; Maex, Karen (2002) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Comparative Hall studies in the electron - and hole-doped manganites La0.33Ca0.67MnO3 and La0.70Ca0.30MnO3
Gordon, Ivan; Wagner, Patrick; Das, Arabinda; Vanacken, J.; Moshchalkov, V. V.; Bruynseraede, Y.; Schuddinck, W.; Van Tendeloo, G.; Ziese, M.; Borghs, Gustaaf (2000) -
Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Kokubo, Terukazu; Das, Arabinda; Furukawa, Yukiko; Vos, Ingrid; Iacopi, Francesca; Struyf, Herbert; Van Aelst, Joke; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Bender, Hugo; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Van Hove, Marleen; Vanhaelemeersch, Serge; Peterson, William; Shiota, A.; Maex, Karen (2002) -
Damascene integration feasability of porous SiLK resin films
Waeterloos, Joost; Struyf, Herbert; Van Aelst, Joke; Das, Arabinda; Caluwaerts, Rudy; Alaerts, Carine; Boullart, Werner; Tokei, Zsolt; Van Hove, Marleen; Maex, Karen (2002) -
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Iacopi, Francesca; Zistl, C.; Jehoul, Christiane; Tokei, Zsolt; Le, Quoc Toan; Das, Arabinda; Sullivan, C.; Prokopowicz, G.; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2002) -
Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
Iacopi, Francesca; Patz, Michael; Vos, Ingrid; Tokei, Zsolt; Sijmus, Bram; Le, Quoc Toan; Sleeckx, Erik; Eyckens, Brenda; Struyf, Herbert; Das, Arabinda; Maex, Karen (2003) -
Influence of the morphology on the magneto-transport properties of laser-ablated ultrathin La0.7Ba0.3MnO3 films
Das, Arabinda; Gordon, Ivan; Wagner, Patrick; Cannaerts, M.; Moshchalkov, V. V.; Bruynseraede, Y.; Schuddinck, W.; Van Tendeloo, G.; Borghs, Gustaaf (2001) -
Post patterning meso porosity creation: a potential solution for pore sealing
Caluwaerts, Rudy; Van Hove, Marleen; Beyer, Gerald; Hoofman, Romano; Struyf, Herbert; Brom - Verheyden, Greja; Waeterloos, Joost; Tokei, Zsolt; Iacopi, Francesca; Carbonell, Laure; Le, Quoc Toan; Das, Arabinda; Vos, Ingrid; Demuynck, Steven; Maex, Karen (2003)