Browsing by author "Aguilera, Lidia"
Now showing items 1-8 of 8
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Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier (2008) -
Improved characterization of high-k degradation with vacuum C-AFM
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier (2008) -
Improved nano-scale characterization of high-k dielectrics with vacuum C-AFM
Polspoel, Wouter; Aguilera, Lidia; Vandervorst, Wilfried; Volodin, Alexander; Van Haesendonck, Chris; Conard, Thierry (2007) -
Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics
Aguilera, Lidia; Polspoel, Wouter; Vandervorst, Wilfried; Nafria, Montserrat; Aymerich, Xavier (2007) -
Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics
Aguilera, Lidia; Polspoel, Wouter; Volodin, Alexander; Van Haesendonck, Chris; Porti, Marc; Vandervorst, Wilfried; Nafria, Montserrat; Aymerich, Xavier (2008) -
Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier (2008) -
Nanoscale and device level electrical behavior of annealed ALD Hf-based gate oxide stacks grown with different precursors
Bayerl, Albin; Lanza, Mario; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier; De Gendt, Stefan (2013) -
Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment
Aguilera, Lidia; Polspoel, Wouter; Porti, Marc; Vandervorst, Wilfried; Nafria, Montserrat; Aymerich, Xavier (2008)