Browsing by author "Van Marcke, Patricia"
Now showing items 1-20 of 20
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3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
Qiu, Yang; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried (2014) -
Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography
Kundu, Paromita; Fleischmann, Claudia; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; van der Heide, Paul (2018) -
An in-depth study of high-performing strained germanium nanaowires pFETs
Mitard, Jerome; Jang, Doyoung; Eneman, Geert; Arimura, Hiroaki; Parvais, Bertrand; Richard, Olivier; Van Marcke, Patricia; Witters, Liesbeth; Capogreco, Elena; Bender, Hugo; Ritzenthaler, Romain; Mertens, Hans; Hikavyy, Andriy; Loo, Roger; Dekkers, Harold; Sebaai, Farid; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine (2018) -
Characterization of a FinFET 6T-SRAM cell by tomography
Richard, Olivier; Demuynck, Steven; Veloso, Anabela; Van Marcke, Patricia; Bender, Hugo (2010) -
Characterization of a FinFET 6T-SRAM cell by tomography
Richard, Olivier; Demuynck, Steven; Veloso, Anabela; Van Marcke, Patricia; Bender, Hugo (2009) -
Characterization of nanodevices by STEM tomography
Richard, Olivier; Vandooren, Anne; Kar, Gouri Sankar; Van Marcke, Patricia; Bender, Hugo (2011-11) -
Corrosion of FIB-milled Cu during air exposure
Bender, Hugo; Richard, Olivier; Van Marcke, Patricia; Drijbooms, Chris (2005-04) -
Corrosion of FIBed Cu
Bender, Hugo; Richard, Olivier; Benedetti, Alessandro; Van Marcke, Patricia; Drijbooms, Chris (2005) -
Dual beam FIB/SEM cross-section imaging of nano-structures
Bender, Hugo; Drijbooms, Chris; Van Marcke, Patricia; Geypen, Jef; Marrant, Koen (2007) -
Focused ion beam sample preparation: applications in materials science
Bender, Hugo; Benedetti, Alessandro; Richard, Olivier; Van Marcke, Patricia; Drijbooms, Chris (2003) -
In situ UHVEM study of {113}-defect formation in Si nanowires
Vanhellemont, Jan; Anada, S.; Yasuda, H.; Van Marcke, Patricia; Bender, Hugo; Rooyackers, Rita; Vandooren, Anne (2015) -
InAs/GaSb interface investigation by high resolution HAADF-STEM
Favia, Paola; Richard, Olivier; El Kazzi, Salim; Van Marcke, Patricia; Bender, Hugo (2016) -
Molybdenum as an Alternative Metal: Thin Film Properties
Founta, Valeria; Witters, Thomas; Mertens, Sofie; Vanstreels, Kris; Meersschaut, Johan; Van Marcke, Patricia; Korytov, Maxim; Franquet, Alexis; Wilson, Chris; Tokei, Zsolt; Van Elshocht, Sven; Adelmann, Christoph (2019) -
Plan-view specimen preparation of device structures with FIB
Bender, Hugo; Van Marcke, Patricia; Richard, Olivier; Favia, Paola (2015) -
Probing Magnetic Defects in Ultra-Scaled Nanowires with Optically Detected Spin Resonance in Nitrogen-Vacancy Center in Diamond
Celano, Umberto; Zhong, Hai; Ciubotaru, Florin; Stoleriu, Laurentiu; Stark, Alexander; Rickhaus, Peter; de Oliveira, Felipe Favaro; Munsch, Mathieu; Favia, Paola; Korytov, Maxim; Van Marcke, Patricia; Maletinsky, Patrick; Adelmann, Christoph; van der Heide, Paul (2021) -
Probing the evolution of electrically active defects in doped ferroelectric HfO2 during wake-up and fatigue
Celano, Umberto; Chen, Yi-Hsuan; Minj, Albert; Banerjee, Kaustuv; Ronchi, Nicolo; McMitchell, Sean; Van Marcke, Patricia; Favia, Paola; Wu, T. L.; Kaczer, Ben; Van den Bosch, Geert; Van Houdt, Jan; van der Heide, Paul (2020) -
Some observations on the corrosion of Cu after FIB preparation
Bender, Hugo; Richard, Olivier; Benedetti, Alessandro; Van Marcke, Patricia; Drijbooms, Chris (2004) -
Structural analysis of TSVs
Bender, Hugo; Drijbooms, Chris; Van Marcke, Patricia; Geypen, Jef; Richard, Olivier; Favia, Paola (2010) -
Structural characterization of through silicon vias (TSV)
Bender, Hugo; Drijbooms, Chris; Van Marcke, Patricia; Geypen, Jef; Philipsen, Harold; Radisic, Alex (2012) -
TEM analysis in semiconductor industry: R&D examples of future needs
Richard, Olivier; Geypen, Jef; Favia, Paola; Verleysen, Eveline; Marrant, Koen; Van Marcke, Patricia; Bender, Hugo (2010)