Browsing by author "Schneider, Dieter"
Now showing items 1-6 of 6
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Effect of pore structure of nanometer scale porous films on the measured elastic modulus
Vanstreels, Kris; Wu, Chen; Gonzalez, Mario; Schneider, Dieter; Gidley, David; Verdonck, Patrick; Baklanov, Mikhaïl (2013) -
Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
Vanstreels, Kris; Wu, Chen; Gonzalez, Mario; Verdonck, Patrick; Martini, Roberto; Schneider, Dieter; Baklanov, Mikhaïl (2012) -
Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics
Vanstreels, Kris; Wu, Chen; Verdonck, Patrick; Schneider, Dieter; Gonzalez, Mario; Martini, Roberto; Baklanov, Mikhaïl (2013) -
Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
Marsik, Premysl; Verdonck, Patrick; Schneider, Dieter; De Roest, David; Kaneko, Shinya; Baklanov, Mikhaïl (2008) -
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl (2007) -
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl (2008)