Browsing by author "Falepin, Annelies"
Now showing items 1-8 of 8
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Formation and microstructure of cubic metastable iron silicides synthesized during pulsed laser annealing
Falepin, Annelies; Cottenier, S.; Comrie, C.M.; Richard, Olivier; Bender, Hugo; Langouche, G.; Vantomme, Andre (2003) -
Implementation of molecular ion implant technology for PMOS extension
Falepin, Annelies; Collart, Erik; Tran, Sandra; Harris, Mark; Ameen, Mike; Hoffmann, Thomas Y.; Rosseel, Erik; Saino, Kanto; Horiguchi, Naoto; Absil, Philippe (2008) -
Influence of the process sequence and termal budget on the strain of SiC stressor layers formed by ion implantation
Rosseel, Erik; Ortolland, Claude; Hikavyy, Andriy; Schram, Tom; Falepin, Annelies; Hoffmann, Thomas Y.; Douhard, Bastien; Moussa, Alain; Vandervorst, Wilfried; Ameen, Mike; Rubin, Leonard (2010) -
Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion Implantation
Rosseel, Erik; Ortolland, Claude; Hikavyy, Andriy; Schram, Tom; Falepin, Annelies; Hoffmann, Thomas Y.; Vandervorst, Wilfried; Ameen, Mike; Rubin, Leonard (2010-10) -
Metastable iron silicide phase formation by pulsed laser annealing
Comrie, C.M.; Falepin, Annelies; Richard, Olivier; Bender, Hugo; Vantomme, Andre (2004-03) -
Post extension ion implant photo resist strip for 32 nm technology and beyond
Mannaert, Geert; Witters, Liesbeth; Shamiryan, Denis; Boullart, Werner; Han, Keping; Luo, Shiian; Falepin, Annelies; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo (2008) -
Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing
Augendre, E.; Pawlak, Bartek; Kubicek, Stefan; Hoffmann, Thomas; Chiarella, Thomas; Kerner, Christoph; Severi, Simone; Falepin, Annelies; Ramos, Emilio; De Keersgieter, An; Eyben, Pierre; Vanhaeren, Danielle; Vandervorst, Wilfried; Jurczak, Gosia; Absil, Philippe; Biesemans, Serge (2007) -
Ultra shallow junctions formed by sub-melt laser annealing
Falepin, Annelies; Janssens, Tom; Severi, Simone; Vandervorst, Wilfried; Felch, S.B.; Parihar, V.; Mayur, A. (2005)