Browsing by author "Wen, Lianggong"

A comb based in-plane SiGe capacitive accelerometer for above-IC integration

Wen, Lianggong; Wouters, Kristof; Haspeslagh, Luc; Witvrouw, Ann; Puers, Bob (2010)

A parylene temporary packaging technique for MEMS wafer handling

Wen, Lianggong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2012)

Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers

Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011)

An in-plane SiGe differential capacitive accelerometer for above-IC integration

Wen, Lianggong; Wouters, Kristof; Haspeslagh, Luc; Witvrouw, Ann; Puers, Bob (2011-07)

Design and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometer

Wen, Lianggong; Haspeslagh, Luc; De Coster, Jeroen; Witvrouw, Ann; Puers, Bob (2010)

Poly-SiGe-based MEMS thin-film encapsulation

Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann (2012)