Browsing by author "Tomida, Kazuyuki"
Now showing items 21-29 of 29
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Investigation of leakage mechanisms in ALD Sr-rich SrTiO films
Kaczer, Ben; Wang, W. C.; Afanasiev, Valeri; Pawlak, Malgorzata; Kim, Min-Soo; Tomida, Kazuyuki; Debusschere, Ingrid; Van Elshocht, Sven; Altimime, Laith; Kittl, Jorge (2010) -
Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Tomida, Kazuyuki; Popovici, Mihaela Ioana; Opsomer, Karl; Menou, Nicolas; Delabie, Annelies; Swerts, Johan; Steenbergen, Johnny; Kaczer, Ben; Van Elshocht, Sven; Detavernier, Christophe; Wouters, Dirk; Kittl, Jorge (2009) -
Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Tomida, Kazuyuki; Popovici, Mihaela Ioana; Opsomer, Karl; Menou, Nicolas; Wang, Wan-Chih; Delabie, Annelies; Swerts, Johan; Steenbergen, Johnny; Kaczer, Ben; Van Elshocht, Sven; Detavernier, Christophe; Afanasiev, Valeri; Wouters, Dirk; Kittl, Jorge (2010) -
Plasma enhanced atomic layer deposited Ru for MIMCAP applications
Swerts, Johan; Salimullah, M.M.; Popovici, Mihaela Ioana; Kim, Min-Soo; Pawlak, Malgorzata; Delabie, Annelies; Schaekers, Marc; Tomida, Kazuyuki; Kaczer, Ben; Opsomer, Karl; Vrancken, Christa; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge; Van Elshocht, Sven (2011) -
Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis
Tomida, Kazuyuki; Popovici, Mihaela Ioana; Swerts, Johan; Wang, Mugwort; Kaczer, Ben; Pawlak, Malgorzata; Van Elshocht, Sven; Kim, Min-Soo; Debusschere, Ingrid; Afanasiev, Valeri; Altimime, Laith; Kittl, Jorge (2011) -
Scalability of ALD strontium titanate films
Popovici, Mihaela Ioana; Swerts, Johan; Tomida, Kazuyuki; Kim, Min-Soo; Delabie, Annelies; Meersschaut, Johan; Franquet, Alexis; Kaczer, Ben; Jurczak, Gosia; Van Elshocht, Sven (2012) -
Towards 1X DRAM: Improved leakage 0.4 nm EOT STO-based MIMcap and explanation of leakage reduction mechanism showing further potential
Pawlak, Malgorzata; Kaczer, Ben; Wang, Wan-Chih; Kim, Min-Soo; Popovici, Mihaela Ioana; Swerts, Johan; Tomida, Kazuyuki; Opsomer, Karl; Schaekers, Marc; Vrancken, Christa; Govoreanu, Bogdan; Belmonte, Attilio; Demeurisse, Caroline; Debusschere, Ingrid; Altimime, Laith; Afanasiev, Valeri; Kittl, Jorge (2011) -
Understanding of trap-assisted tunneling current - assisted by oxygen vacancies in RuOx/SrTiO3/TiN MIM capacitor for the DRAM Application
Kim, Min-Soo; Kaczer, Ben; Starschich, Sergej; Popovici, Mihaela Ioana; Swerts, Johan; Richard, Olivier; Tomida, Kazuyuki; Vrancken, Christa; Van Elshocht, Sven; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2012) -
Understanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized ruthenium
Popovici, Mihaela Ioana; Delabie, Annelies; Adelmann, Christoph; Meersschaut, Johan; Franquet, Alexis; Tallarida, Massimo; Van den Berg, Jaap; Richard, Olivier; Swerts, Johan; Tomida, Kazuyuki; Kim, Min-Soo; Tielens, Hilde; Bender, Hugo; Conard, Thierry; Jurczak, Gosia; Van Elshocht, Sven; Schmeisser, Dieter (2013)