Browsing by author "Melkonyan, Davit"

3D dopant profiling in silicon nanowires

Fleischmann, Claudia; Melkonyan, Davit; Arnoldi, Laurent; Bogdanowicz, Janusz; Kumar, Arul; Veloso, Anabela; Vandervorst, Wilfried (2016)

3D imaging of atom probe tip shapes with atomic force microscopy

Fleischmann, Claudia; Paredis, Kristof; Melkonyan, Davit; Op de Beeck, Jonathan; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018)

A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon

Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018)

Accuracy in APT analysis: The case of boron in silicon

Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Vandervorst, Wilfried (2017)

Accurate stoichiometric analysis of Al1 xGaxN/GaN structures using APT and the influence of laser, poles and zone lines

Morris, Richard; Arnoldi, Laurent; Cuduvally, Ramya; Melkonyan, Davit; Fleischmann, Claudia; Zhao, Ming; Vandervorst, Wilfried (2017)

APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2

Melkonyan, Davit; Fleischmann, Claudia; Veloso, Anabela; Arnoldi, Laurent; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2016)

Atom probe conditions for stoichiometric quantification of GaN and Al1 xGaxN

Morris, Richard; Arnoldi, Laurent; Cuduvally, Ramya; Melkonyan, Davit; Fleischmann, Claudia; Zhao, Ming; Vandervorst, Wilfried (2017)

Atom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantification

Morris, Richard; Cuduvally, Ramya; Melkonyan, Davit; Zhao, Ming; van der Heide, Paul; Vandervorst, Wilfried (2019)

Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts

Melkonyan, Davit; Fleischmann, Claudia; Arnoldi, Laurent; Demeulemeester, Jelle; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2017)

Atom probe tomography for advanced nanoelectronic devices: current status and perspectives

Barnes, J.P.; Grenier, A.; Mouton, I.; Barraud, S; Audoit, G.; Bogdanowicz, Janusz; Fleischmann, Claudia; Melkonyan, Davit; Vandervorst, Wilfried; Duguay, S.; Roland, N.; Vurpillot, F; Blavette, D (2018)

Atom probe tomography for advanced semiconductor technology research

Fleischmann, Claudia; Melkonyan, Davit; Arnoldi, Laurent; Morris, Richard; Bogdanowicz, Janusz; Vandervorst, Wilfried (2017)

Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy

Scheerder, Jeroen; Fleischmann, Claudia; Dialameh, Masoud; Melkonyan, Davit; Morris, Richard; Vandervorst, Wilfried; van der Heide, Paul (2019)

Atomic scale observation of atom distributions in 3D devices using atom probe tomography

Melkonyan, Davit (2019-10)

Challenges for APT in advanced semiconductor technology research

Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Arnoldi, Laurent; Kumar, Arul; Vurpillot, Francois; Vandervorst, Wilfried (2016)

Challenges on surface conditioning in 3D device architectures: triple-gate FinFETs, gate-all-around lateral and vertical nanowire FETs

Veloso, Anabela; Paraschiv, Vasile; Vecchio, Emma; Devriendt, Katia; Li, Waikin; Simoen, Eddy; Chan, BT; Tao, Zheng; Rosseel, Erik; Loo, Roger; Milenin, Alexey; Kunert, Bernardette; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; van Dorp, Dennis; Altamirano Sanchez, Efrain; Brus, Stephan; Marien, Philippe; Fleischmann, Claudia; Melkonyan, Davit; Huynh Bao, Trong; Eneman, Geert; Hellings, Geert; Sibaja-Hernandez, Arturo; Matagne, Philippe; Waldron, Niamh; Mocuta, Dan; Collaert, Nadine (2017)