Browsing by author "Parihar, V."
Now showing items 1-6 of 6
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Analysis of As, P diffusion and defect evolution during sub-millisecond non-melt laser annealing based on an atomistic kinetic Monte Carlo approach
Noda, Taiji; Vandervorst, Wilfried; Felch, S.; Parihar, V.; Cuperus, Aldert; Mcintosh, R.; Vrancken, Christa; Rosseel, Erik; Bender, Hugo; Van Daele, Benny; Niwa, Masaaki; Umimoto, H.; Schreutelkamp, Rob; Absil, Philippe; Jurczak, Gosia; De Meyer, Kristin; Biesemans, Serge; Hoffmann, Thomas Y. (2007) -
Laser annealed junctions: process integration sequence optimization for advanced CMOS technologies
Hoffmann, Thomas Y.; Noda, Taiji; Felch, S.; Severi, Simone; Parihar, V.; Forstner, H.; Vrancken, Christa; de Potter de ten Broeck, Muriel; Van Daele, Benny; Bender, Hugo; Niwa, Masaaki; Schreutelkamp, Rob; Vandervorst, Wilfried; Biesemans, Serge; Absil, Philippe (2007) -
Modeling and experiments of dopant diffusion and defects for laser annealed junctions and advanced USJ
Noda, Taji; Vandervorst, Wilfried; Felch, S.; Parihar, V.; Vrancken, Christa; Hoffmann, Thomas Y. (2008) -
Study of dopant diffusion and defect evolution for advanced ultra shallow junctions based on atomistic kinetic monte carlo approach
Noda, T.; Vandervorst, Wilfried; Felch, S.; Parihar, V.; Vrancken, Christa; Severi, Simone; Hoffmann, Thomas Y.; Falepin, A.; Janssens, Tom; Bender, Hugo; Van Daele, B.; Eyben, Pierre; Niwa, M.; Schreutelkamp, R.; Nouri, F.; Absil, Philippe; Jurczak, Gosia; De Meyer, Kristin; Biesemans, Serge (2007) -
Ultra shallow junctions formed by sub-melt laser annealing
Falepin, Annelies; Janssens, Tom; Severi, Simone; Vandervorst, Wilfried; Felch, S.B.; Parihar, V.; Mayur, A. (2005) -
Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing
Felch, S.B.; Collart, E.; Parihar, V.; Thirupapulyur, S.; Schreutelkamp, R.; Pawlak, Bartek; Hoffmann, Thomas Y.; Severi, Simone; Eyben, Pierre; Vandervorst, Wilfried; Noda, Taiji (2008)