Browsing by author "Zhang, Haodong"

A chemisorbed interfacial layer for seeding atomic layer deposition on graphite

Brown, Anton; Greenwood, John; Lockhart de la Rosa, Cesar Javier; Gonzalez, Miriam C. Rodriguez; Verguts, Ken; Brems, Steven; Zhang, Haodong; Hirsch, Brandon E.; De Gendt, Stefan; Delabie, Annelies; Caymax, Matty; Teyssandier, Joan; De Feyter, Steven (2021)

Assessing the prospects of atomic layer deposition for two-dimensional materials in microelectronic applications

Groven, Benjamin; Tomczak, Yoann; Nalin Mehta, Ankit; Bender, Hugo; Zhang, Haodong; Schram, Tom; Smets, Quentin; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies (2018)

Atomic layer processing of 2D materials for beyond CMOS applications

Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Chiappe, Daniele; Heyns, Marc; Radu, Iuliana (2016)

Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides

Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2016)

Chemical vapor deposition of 2D tin sulfides using SnCl4 and H2S

Zhang, Haodong; Balaji, Yashwanth; Nalin Mehta, Ankit; Caymax, Matty; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2018)

Formation mechanism of 2D SnS2 and SnS by chemical vapor deposition using SnCl4 and H2S

Zhang, Haodong; Balaji, Yashwanth; Nalin Mehta, Ankit; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2018)

Formation mechanism of 2D SnS2 bycvd using SnCl4 and H2S

Zhang, Haodong; Balaji, Yashwanth; Nalin Mehta, Ankit; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2018)

Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition

Delabie, Annelies; Tomczak, Yoann; Heyne, Markus; Groven, Benjamin; van Pelt, Thomas; Zhang, Haodong; De Gendt, Stefan; Van Elshocht, Sven; Caymax, Matty; Radu, Iuliana (2017)

MoS2 functionalization with a Sub-nm thin SiO2 layer for atomic layer deposition of high-k dielectrics

Zhang, Haodong; Arutchelvan, Goutham; Meersschaut, Johan; Gaur, Abhinav; Conard, Thierry; Bender, Hugo; Lin, Dennis; Asselberghs, Inge; Heyns, Marc; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2017)

Nucleation and growth mechanism of 2d SnS2 by chemical vapor deposition: initial 3D growth followed by 2D lateral growth

Zhang, Haodong; van Pelt, Thomas; Nalin Mehta, Ankit; Bender, Hugo; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Vandervorst, Wilfried; Delabie, Annelies (2018)

Nucleation and Growth Mechanisms of 2D Semiconductor/high-k Dielectric Heterostacks

Zhang, Haodong (2018-09)

Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

Zhang, Haodong; Chiappe, Daniele; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Nuytten, Thomas; Mannarino, Manuel; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2017)

Nucleation mechanisms for chemical vapor deposition and atomic layer deposition of 2D semiconductor materials

Delabie, Annelies; Zhang, Haodong; van Pelt, Thomas; Groven, Benjamin; Heyne, Markus; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2017)

Nucleation of Al2O3 atomic layer deposition on MoS2, a two-dimensional semiconductor

Zhang, Haodong; Chiappe, Daniele; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2016)

Structural characterization of CVD SnS layers

Nalin Mehta, Ankit; Zhang, Haodong; Richard, Olivier; Bender, Hugo; Delabie, Annelies; Vandervorst, Wilfried (2017)

Structural characterization of SnS crystals formed by chemical vapour deposition

Nalin Mehta, Ankit; Zhang, Haodong; Dabral, Ashish; Richard, Olivier; Favia, Paola; Bender, Hugo; Delabie, Annelies; Caymax, Matty; Houssa, Michel; Pourtois, Geoffrey; Vandervorst, Wilfried (2017-12)