Browsing by author "Beckx, Stephan"
Now showing items 1-20 of 76
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0.5µm and 0.35µm BiCMOS - silicon etch developement at IMEC
Beckx, Stephan (1998) -
45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μm
Henson, Kirklen; Lander, Rob; Demand, Marc; Dachs, Charles; Kaczer, Ben; Deweerd, Wim; Schram, Tom; Tokei, Zsolt; Hooker, Jacob; Cubaynes, Florence; Beckx, Stephan; Boullart, Werner; Coenegrachts, Bart; Vertommen, Johan; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Kaiser, M.; Everaert, Jean-Luc; Jurczak, Gosia; Biesemans, Serge (2004) -
A compact photonic horizontal spot-size converter realized in silicon-on-insulator
Luyssaert, Bert; Vandersteegen, Peter; Taillaert, D.; Dumon, Pieter; Bogaerts, Wim; Bienstman, Peter; Van Thourhout, D.; Wiaux, Vincent; Beckx, Stephan; Baets, Roel (2005-01) -
A nanophotonic 4x4 wavelength router in silicon-on-insulator
Dumon, Pieter; Bogaerts, Wim; Van Thourhout, Dries; Baets, Roel; Wouters, Johan M. D.; Beckx, Stephan; Jaenen, Patrick (2005) -
ALD deposition of high-k and metal gate stacks for advanced CMOS applications
Heyns, Marc; Beckx, Stephan; Caymax, Matty; Claes, Martine; De Gendt, Stefan; Degraeve, Robin; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Hooker, Jacob; Houssa, Michel; Kwak, Dong Hwa; Lander, Rob; Lujan, Guilherme; Maes, Jan; Niwa, Masaaki; Pantisano, Luigi; Puurunen, R.; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Van Elshocht, Sven; Vandervorst, Wilfried (2004) -
Angle resolved XPS characterization of the formation of Cl and Br bonds in poly-silicon etching and its cleaning
Kim, Young-Chang; Beckx, Stephan; Vanhaelemeersch, Serge; Vandervorst, Wilfried (1998) -
Angle resolved XPS characterization of the formation of Cl and Br bonds in poly-silicon etching and its cleaning
Kim, Young-Chang; Beckx, Stephan; Vanhaelemeersch, Serge; Vandervorst, Wilfried (1999) -
Bandwidth engineering of photonic crystal waveguide bends
Borel, P.I.; Frandsen, L.H.; Harpoeth, A.; Leon, J.B.; Liu, H.; Kristensen, M.; Bogaerts, Wim; Dumon, Pieter; Baets, Roel; Wiaux, Vincent; Wouters, Johan M. D.; Beckx, Stephan (2004) -
Basic photonic wire components in silicon-on-insulator
Dumon, Pieter; Roelkens, Gunther; Bogaerts, Wim; Van Thourhout, Dries; Wouters, Johan; Beckx, Stephan; Jaenen, Patrick; Baets, Roel (2005) -
Basic structures for photonic integrated circuits in silicon-on-insulator
Bogaerts, Wim; Taillaert, Dirk; Luyssaert, Bert; Dumon, Pieter; Van Campenhout, Jan; Bienstman, P.; Van Thourhout, Dries; Baets, Roel; Wiaux, Vincent; Beckx, Stephan (2004) -
Cascaded Mach-Zehnder filters in silicon-on-insulator photonic wires fabricated with deep UV lithography
Dumon, Pieter; Bogaerts, Wim; Van Thourhout, Dries; Taillaert, Dirk; Wiaux, Vincent; Beckx, Stephan; Wouters, Johan M. D.; Baets, Roel (2004) -
CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach
Kottantharayil, Anil; Verheyen, Peter; Collaert, Nadine; Dixit, Abhisek; Kaczer, Ben; Snow, Jim; Vos, Rita; Locorotondo, Sabrina; Degroote, Bart; Shi, Xiaoping; Rooyackers, Rita; Mannaert, Geert; Brus, Stephan; Yim, Yong Sik; Lauwers, Anne; Goodwin, Michael; Kittl, Jorge; Van Dal, Mark; Richard, Olivier; Veloso, Anabela; Kubicek, Stefan; Beckx, Stephan; Boullart, Werner; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Deep UV lithography for mass-manufacturing photonic crystal-based components
Bogaerts, Wim; Taillaert, Dirk; Baets, Roel; Wiaux, Vincent; Beckx, Stephan (2002) -
Deep UV lithography for planar photonic crystal structures
Bogaerts, Wim; Dumon, Pieter; Van Campenhout, Joris; Wiaux, Vincent; Wouters, Johan M. D.; Beckx, Stephan; Taillaert, Dirk; Luyssaert, Bert; Van Thourhout, Dries; Baets, Roel (2003-10) -
Diffusion of solvents in thin porous films
Shamiryan, Denis; Baklanov, Mikhaïl; Lyons, Philip; Beckx, Stephan; Boullart, Werner; Maex, Karen (2007) -
Dry etch processing of Multiple Gate FETs with metal gate electrode
Demand, Marc; Paraschiv, Vasile; Shamiryan, Denis; Beckx, Stephan; Boullart, Werner; Vanhaelemeersch, Serge (2005) -
Electrical assessment of gate oxide punchthrough in advanced polysilicon high density plasma etch.
Van den Bosch, Geert; Beckx, Stephan; Dupas, Luc; Vanhaelemeersch, Serge; Deferm, Ludo (1999) -
Evaluation of megasonic cleaning for sub-90-nm technologies
Vereecke, Guy; Holsteyns, Frank; Arnauts, Sophia; Beckx, Stephan; Jaenen, Patrick; Kenis, Karine; Lismont, Mark; Lux, Marcel; Vos, Rita; Snow, Jim; Mertens, Paul (2005) -
Experimental demonstration of high coupling efficiency between wide ridge dielectric waveguides and single-mode photonic crystal waveguides
Sanchis, P.; Garcia, J.; Mari, J.; Bogaerts, Wim; Dumon, Pieter; Taillaert, Dirk; Baets, Roel; Wiaux, Vincent; Wouters, Johan M. D.; Beckx, Stephan (2004) -
Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography
Bogaerts, Wim; Wiaux, Vincent; Taillaert, Dirk; Beckx, Stephan; Luyssaert, Bert; Bienstman, P.; Baets, Roel (2002)