Browsing by author "Fyen, Wim"
Now showing items 1-20 of 66
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A computational approach to predict the motion of magnetic particles manipulated by on-chip generated magnetic forces
Wirix-Speetjens, Roel; Fyen, Wim; De Boeck, Jo; Borghs, Gustaaf (2005) -
A detailed study of semiconductor wafer drying
Fyen, Wim; Holsteyns, Frank; Bearda, Twan; Arnauts, Sophia; Van Steenbergen, Jan; Doumen, Geert; Kenis, Karine; Mertens, Paul (2004) -
A force study in brush scrubbing
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, Jan (2005) -
A force study of on-chip magnetic particle transport based on tapered conductors
Wirix-Speetjens, Roel; Fyen, Wim; Xu, Kaidong; De Boeck, Jo; Borghs, Gustaaf (2005) -
A fundamental study of the rinsing and drying step in semiconductor wet cleaning
Fyen, Wim (2003-05) -
A high-performance drying method enabling clustered single wafer wet cleaning
Mertens, Paul; Doumen, Geert; Lauerhaas, Jeff; Kenis, Karine; Fyen, Wim; Meuris, Marc; Arnauts, Sophia; Devriendt, Katia; Vos, Rita; Heyns, Marc (2000) -
Advanced wafer surface cleaning technology
Mertens, Paul; Vos, Rita; Vereecke, Guy; Arnauts, Sophia; Bearda, Twan; De Waele, Rita; Eitoku, Atsuro; Fyen, Wim; Geckiere, J.; Hellin, David; Holsteyns, Frank; Kesters, Els; Claes, Martine; Kenis, Karine; Kraus, Harald; Malhouitre, Stephane; Lee, Kuntack; Kocsis, Michael; Onsia, Bart; Garaud, Sylvain; Rip, Jens; Snow, Jim; Teerlinck, I.; Van Hoeymissen, Jan; Barbagini, Francesca; Xu, Kaidong; Paraschiv, Vasile; De Gendt, Stefan; Mannaert, Geert; Heyns, Marc (2004) -
An analytical model to describe the efficiency of an immersion rinsing process
Fyen, Wim; Mertens, Paul (2008-11) -
Cleaning of metal gate stacks for the sub 90nm technology node
Snow, Jim; Kraus, Harald; Vermeyen, Kenneth; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2004) -
Cleaning of metal gate stacks for the sub 90nm technology node
Kraus, Harald; Vermeyen, Kenneth; Snow, Jim; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2003) -
Cleaning of nanoparticles in semiconductor manufacturing
Vereecke, Guy; Arnauts, Sophia; Doumen, Geert; Eitoku, Atsuro; Fransaer, J.; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Lee, Kuntack; Lux, Marcel; Snow, Jim; Vinckier, Chris; Vos, Rita; Xu, Kaidong; Mertens, Paul (2004) -
Cleaning, rinsing and drying aspects in post-Cu-CMP clean
Fyen, Wim; Vos, Rita; Teerlinck, Ivo; Vrancken, Evi; Grillaert, Joost; Meuris, Marc; Heyns, Marc (1999) -
Cleaning, rinsing and drying effects in post-Cu CMP clean
Fyen, Wim; Vos, Rita; Teerlinck, Ivo; Vrancken, Evi; Grillaert, Joost; Meuris, Marc; Mertens, Paul; Heyns, Marc (2000) -
Cleaning, rinsing and drying issues in post-Cu CMP cleaning: a case study
Fyen, Wim; Vos, Rita; Vrancken, Evi; Grillaert, J.; Meuris, Marc; Heyns, Marc (2002) -
Clustered single wafer wet cleaning
Mertens, Paul; Holsteyns, Frank; Vos, Rita; Vereecke, Guy; Fyen, Wim; Lauerhaas, Jeff; Xu, Kaidong; Bearda, Twan; Teerlinck, Ivo; Arnauts, Sophia; Kenis, Karine; Schmidt, Michael; Heyns, Marc (2002) -
Correlation between haze of the wafer and particle-count on wafers: a new approach to monitor nano-sized particles
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Lux, Marcel; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2002) -
Critical issues in post Cu CMP cleaning
Fyen, Wim; Vos, Rita; Teerlinck, Ivo; Lagrange, Sébastien; Lauerhaas, Jeff; Meuris, Marc; Mertens, Paul; Heyns, Marc (2000) -
Critical issues in the integration of Copper and low-k dielectrics
Donaton, R. A.; Coenegrachts, Bart; Maex, Karen; Struyf, Herbert; Vanhaelemeersch, Serge; Beyer, Gerald; Richard, Emmanuel; Vervoort, Iwan; Fyen, Wim; Grillaert, Joost; van der Groen, Sonja; Stucchi, Michele; De Roest, David (1999) -
Damage-free removal of nano-sized particles, heading towards a red brick wall
Mertens, Paul; Fyen, Wim; Vereecke, Guy; Xu, Kaidong; Lauerhaas, J.; Holsteyns, Frank; Van Doorne, Patrick; Kesters, Els; Vos, Rita (2003) -
Developments in cleaning technology for critical layers
Heyns, Marc; Arnauts, Sophia; Bearda, Twan; Claes, M.; Cornelissen, Ingrid; De Gendt, Stefan; Doumen, Geert; Fyen, Wim; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Onsia, Bart; Röhr, Erika; Schaekers, Marc; Teerlinck, Ivo; Van Doorne, Patrick; Van Hoeymissen, Jan; Vereecke, Guy; Vos, Rita; Wolke, K. (2000)