Browsing by author "Kim, Tae-Gon"
Now showing items 21-40 of 42
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In-line critical dimension and sidewall roughness metrology study for compound nanostructure process control by in-line 3D atomic force microscopy
Kim, Tae-Gon; Ryu, Henry; Jo, Ah-jin; Cho, Sang-Joon; Park, Sang-il; Vandeweyer, Tom (2016) -
In-line metrology for atomic resolution local height variation
Kim, Tae-Gon; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Zandiatashbar, Ardavan; Cho, Sang-Joon; Park, Sang-il; Irmer, Bernd; Schmidt, Sebastian (2017) -
Influence of environments on the footprint of particle contamination on EUV mask
Kim, Tae-Gon; De Gendt, Stefan; Heyns, Marc; Kesters, Els; Struyf, Herbert; Mertens, Paul (2011) -
Influence of gas type on ultrasound cleaning efficiency
Brems, Steven; Camerotto, Elisabeth; Hauptmann, Marc; Kim, Tae-Gon; Struyf, Herbert; Mertens, Paul; Heyns, Marc; De Gendt, Stefan (2010) -
Insight into defect-free chemical mechanical cleaning
Kim, Tae-Gon (2011) -
Insight of chemical mechanical cleaning and its future
Kim, Tae-Gon (2010) -
Investigation of physical cleaning process window by atomic force microscope
Kim, Tae-Gon; Wostyn, Kurt; Bearda, Twan; Park, J.-G.; Mertens, Paul; Heyns, Marc (2009) -
Investigation of physical cleaning process window by atomic force microscope
Kim, Tae-Gon; Wostyn, Kurt; Bearda, Twan; Park, Jin-Goo; Mertens, Paul; Heyns, Marc (2009-10) -
Large-area, catalyst-free heteroepitaxy of InAs nanowires on Si by MOVPE
Cantoro, Mirco; Wang, Gang; Lin, Dennis; Klekachev, Alexander; Richard, Olivier; Bender, Hugo; Kim, Tae-Gon; Clemente, Francesca; Adelmann, Christoph; van der Veen, Marleen; Brammertz, Guy; Degroote, Stefan; Leys, Maarten; Caymax, Matty; Heyns, Marc; De Gendt, Stefan (2011) -
Nanoparticle removal with megasonics: A review
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Kim, Tae-Gon; Xu, XiuMei; Wostyn, Kurt; Mertens, Paul; De Gendt, Stefan (2014) -
Nanotopography control for wafer-to-wafer hybrid bonding by CMP
Heylen, Nancy; Kim, Soon-Wook; Kim, Tae-Gon; Peng, Lan; Nolmans, Philip; Struyf, Herbert; Miller, Andy; Beyer, Gerald; Beyne, Sofie (2017) -
Ni Oxidation study for 3D Interconnect Application
Kim, Tae-Gon; Guerrieri, Stefano (2013) -
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Kim, Tae-Gon; Wostyn, Kurt; Park, Jin-Park; Mertens, Paul; Busnaina, Ahmed A. (2008) -
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Kim, Tae-Gon; Wostyn, Kurt; Park, Jin-Goo; Mertens, Paul; Busnaina, Ahmed (2009) -
Pore sealing of porous low-k films by SAMs for ALD
Armini, Silvia; Verdonck, Patrick; Loyo Prado, Jana; Krishtab, Mikhail; Swerts, Johan; Ciofi, Ivan; Meerschaut, Johan; Kim, Tae-Gon; Adelmann, Christoph; Le Quoc, Toan; Van Elshocht, Sven; Delabie, Annelies; Leunissen, Peter; Baklanov, Mikhaïl (2011) -
Quantitative measurement of pattern collapse and particle removal force
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed; Park, Jin-Goo (2007) -
Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions
Mertens, Paul; Vos, Rita; Vereecke, Guy; Janssens, Tom; Wostyn, Kurt; Claes, Martine; Kesters, Els; Le, Quoc Toan; Halder, Sandip; Hoyer, Ronald; Andreas, Michael; Kim, Kyung Hyun; Barbagini, Francesca; Zijlstra, Aaldert; Holsteyns, Frank; Kim, Tae-Gon; Kenis, Karine; Arnauts, Sophia; Lux, Marcel; Bearda, Twan; Heyns, Marc (2008) -
Scalable, sub 2μm pitch, Cu/SiCN to Cu/SiCN hybrid wafer-to-wafer bonding technology
Beyne, Eric; Kim, Soon-Wook; Peng, Lan; Heylen, Nancy; De Messemaeker, Joke; Okudur, Oguzhan Orkut; Phommahaxay, Alain; Kim, Tae-Gon; Stucchi, Michele; Velenis, Dimitrios; Miller, Andy; Beyer, Gerald (2017) -
Strength analysis of EUV-exposed photo resists by AFM at 40 nm half pitch
Winroth, Gustaf; Gronheid, Roel; Kim, Tae-Gon; Mertens, Paul (2012) -
Study of wetting of nanostructures using decoration by etching
Vereecke, Guy; Xu, XiuMei; Kesters, Els; Simms, Ishan; Nafus, Kathleen; Haensel, Leander; Kim, Tae-Gon; Lismont, Mark; Holsteyns, Frank; De Gendt, Stefan (2014)