Browsing by author "Herregods, Sebastiaan"
Now showing items 1-12 of 12
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Aggregate-Free Micrometer-Thick Mesoporous Silica Thin Films on Planar and Three-Dimensional Structured Electrodes by Hydrodynamic Diffusion Layer Control during Electrochemically Assisted Self-Assembly
Vanheusden, Genis; Philipsen, Harold; Herregods, Sebastiaan; Vereecken, Philippe (2021) -
Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering
Armini, Silvia; Herregods, Sebastiaan; Lecordier, Laurent; Verheyen, Claudia; Delande, Tinne; Demeurisse, Caroline; Spampinato, Valentina; Tokei, Zsolt; Struyf, Herbert (2017) -
Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensions
Armini, Silvia; Zyulkov, Ivan; Herregods, Sebastiaan; Struyf, Herbert (2018) -
Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensions
Armini, Silvia; Zyulkov, Ivan; Herregods, Sebastiaan; Struyf, Herbert (2018) -
Comparing SAM (Self-Assembled Monolayer) deposition methods to passivate copper microbumps for 3D stacking
Houshmand Sharifi, Shamin; Derakhshandeh, Jaber; Armini, Silvia; De Preter, Inge; Bex, Pieter; Hou, Lin; Bartha, Johan W; Neumann, Volker; Herregods, Sebastiaan; Nagano, Fuya; Rebibis, Kenneth June; Miller, Andy; De Wolf, Ingrid; Beyer, Gerald; Beyne, Eric (2017) -
Developing a full wafer-scale approach towards high ALD selectivity on copper vs low-K (and oxides) using a single ALD/SAMS platform
Lecordier, Laurent; Armini, Silvia; Herregods, Sebastiaan (2017) -
Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition process
Armini, Silvia; Herregods, Sebastiaan; Tokei, Zsolt; Charley, Anne-Laure; Leray, Philippe; Lee, Wei Ti; Larson, Tom; Figueiro, Nivea; Koret, Roy; Wolfling, Shay (2018) -
Vapor phase thiol self-assembled monolayers enabling area-selective deposition
Herregods, Sebastiaan; Delande, Tinne; Pasquali, Mattia; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2019) -
Vapor phase thiol self-assembled monolayers for ALD blocking
Herregods, Sebastiaan; Lecordier, Laurent; Delande, Tinne; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2018) -
Vapor phase thiol self-assembled monolayers for DoD ASD
Herregods, Sebastiaan; Delande, Tinne; Pasquali, Mattia; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2019) -
Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry
Lecordier, Laurent; Herregods, Sebastiaan; Armini, Silvia (2018) -
Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale
Herregods, Sebastiaan; Laurent, Lecordier; Vyas, Shashi; Chan, BT; Delande, Tinne; Hetel, Iulian; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2017)