Browsing by author "Menou, Nicolas"
Now showing items 21-28 of 28
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Nano-beam diffraction: crystal structure and strain analysis at the nanoscale
Favia, Paola; Popovici, Mihaela Ioana; Eneman, Geert; Wang, Gang; Bargallo Gonzalez, Mireia; Simoen, Eddy; Menou, Nicolas; Bender, Hugo (2010) -
Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Tomida, Kazuyuki; Popovici, Mihaela Ioana; Opsomer, Karl; Menou, Nicolas; Wang, Wan-Chih; Delabie, Annelies; Swerts, Johan; Steenbergen, Johnny; Kaczer, Ben; Van Elshocht, Sven; Detavernier, Christophe; Afanasiev, Valeri; Wouters, Dirk; Kittl, Jorge (2010) -
Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Tomida, Kazuyuki; Popovici, Mihaela Ioana; Opsomer, Karl; Menou, Nicolas; Delabie, Annelies; Swerts, Johan; Steenbergen, Johnny; Kaczer, Ben; Van Elshocht, Sven; Detavernier, Christophe; Wouters, Dirk; Kittl, Jorge (2009) -
On the process and material sensitivities for high-k based dielectrics
Van Elshocht, Sven; Adelmann, Christoph; Popovici, Mihaela Ioana; Swerts, Johan; Delabie, Annelies; Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Pourtois, Geoffrey; Menou, Nicolas; Breuil, Laurent; Pierreux, Dieter; Maes, Jan; Hardy, An; Van Bael, Marlies; Jurczak, Gosia; Kittl, Jorge (2010) -
Seed layer and multistack approaches to reduce leakage in SrTiO3-based metal-insulator-metal capacitors using TiN bottom electrode
Menou, Nicolas; Popovici, Mihaela Ioana; Opsomer, Karl; Kaczer, Ben; Pawlak, Malgorzata; Adelmann, Christoph; Franquet, Alexis; Favia, Paola; Bender, Hugo; Detavernier, Christophe; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2010) -
Seed layer and multistack approaches to reduce leakage in SrTiO3-based MIM capacitors using TiN bottom electrode
Menou, Nicolas; Popovici, Mihaela Ioana; Opsomer, Karl; Kaczer, Ben; Pawlak, Malgorzata; Franquet, Alexis; Detavernier, Christophe; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2009) -
Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response
Clima, Sergiu; Pourtois, Geoffrey; Menou, Nicolas; Popovici, Mihaela Ioana; Rothschild, Aude; Kaczer, Ben; Van Elshocht, Sven; Wang, Xin Peng; Swerts, Johan; Pierreux, Dieter; De Gendt, Stefan; Wouters, Dirk; Kittl, Jorge (2009) -
Sr-Cp precursor based ALD SrTiO3 for capacitor applications
Maes, Jan; Blomberg, T.; Matero, R.; Tuominen, M.; Swerts, Johan; Menou, Nicolas; Wang, Xin Peng; Kittl, Jorge; Wouters, Dirk (2008)