Browsing by author "Gupta, Anshul"
Now showing items 21-38 of 38
-
Highly scaled ruthenium interconnects
Dutta, Shibesh; Kundu, Shreya; Gupta, Anshul; Jamieson, Geraldine; Gomez Granados, Juan Fernando; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2017) -
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
Tokei, Zsolt; Vega Gonzalez, Victor; Murdoch, Gayle; O'Toole, Martin; Croes, Kristof; Baert, Rogier; van der Veen, Marleen; Adelmann, Christoph; Soulie, Jean-Philippe; Boemmels, Juergen; Wilson, Chris; Park, Seongho; Sankaran, Kiroubanand; Pourtois, Geoffrey; Swerts, Johan; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Lazzarino, Frederic; Versluijs, Janko; Blanco, Victor; Ercken, Monique; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank; Heylen, Nancy; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Morin, Pierre; Jourdan, Nicolas; Van Elshocht, Sven; Ciofi, Ivan; Gupta, Anshul; Zahedmanesh, Houman; Vanstreels, Kris; Na, Myung Hee (2020) -
Integration scheme and 3D RC extractions of three-level supervia at 16 nm half-pitch
Gupta, Anshul; Boemmels, Juergen; Saad, Yves; Ciofi, Ivan; Wilson, Chris (2018) -
Magnonic Band Structure in Vertical Meander-Shaped Co40Fe40B20 Thin Films
Gubbiotti, Gianluca; Sadovnikov, Alexandr; Beginin, Evgeny; Nikitov, Sergey; Wan, Danny; Gupta, Anshul; Kundu, Shreya; Talmelli, Giacomo; Carpenter, Robert; Asselberghs, Inge; Radu, Iuliana; Adelmann, Christoph; Ciubotaru, Florin (2021) -
Metal reliability mechanisms in Ruthenium interconnects
Varela Pedreira, Olalla; Stucchi, Michele; Gupta, Anshul; Vega Gonzalez, Victor; van der Veen, Marleen; Lariviere, Stephane; Wilson, Chris; Tokei, Zsolt; Croes, Kristof (2020) -
Middle-of-line plasma dry etch challenges for Buried Power Rail integration
Radisic, Dunja; Veloso, Anabela; Gupta, Anshul; Hosseini, Maryam; Wang, Shiwei; Mertens, Hans; Chan, BT; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Lazzarino, Frederic; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022) -
PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch
Roda Neve, César; Schuddinck, Pieter; Bufler, Fabian; Xiang, Yang; Farokhnejad, Anita; Mirabelli, Gioele; Vandooren, Anne; Chehab, Bilal; Gupta, Anshul; Hellings, Geert; Ryckaert, Julien (2022-06) -
RC benefits of advanced metallization options
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Contino, Antonino; Gupta, Anshul; Croes, Kristof; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2019) -
RC modeling, scaling trends and mitigation approaches
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Contino, Antonino; Gupta, Anshul; Croes, Kristof; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2018) -
Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
Dutta, Shibesh; Kundu, Shreya; Wen, Lianggong; Jamieson, Geraldine; Croes, Kristof; Gupta, Anshul; Boemmels, Juergen; Wilson, Chris; Adelmann, Christoph; Tokei, Zsolt (2017) -
Ruthenium recess for buried power rail integration
Gupta, Anshul; Grzeskowiak, Jodi; Jourdan, Nicolas; Yu, Kai-Hung; Joy, Nicolas; Kundu, Shreya; Teugels, Lieve; Boemmels, Juergen; Adelmann, Christoph; Heylen, Nancy; Jamieson, Geraldine; Smith, Jeffrey; Raley, Angelique; deVilliers, Anton; Biesemans, Serge; Wilson, Chris; Leusink, Gert; Tokei, Zsolt (2019) -
Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails
Veloso, Anabela; Jourdain, Anne; Radisic, Dunja; Chen, Rongmei; Arutchelvan, Goutham; O'Sullivan, Barry; Arimura, Hiroaki; Stucchi, Michele; De Keersgieter, An; Hosseini, Maryam; Hopf, Toby; D'have, Koen; Wang, Shouhua; Dupuy, Emmanuel; Mannaert, Geert; Vandersmissen, Kevin; Iacovo, Serena; Marien, Philippe; Choudhury, Subhobroto; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Zhou, X.; Gupta, Anshul; Schram, Tom; Briggs, Basoene; Lorant, Christophe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Geypen, Jef; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Soulie, Jean-Philippe; Devriendt, Katia; Chan, BT; Demuynck, Steven; Hiblot, Gaspard; Van der Plas, Geert; Ryckaert, Julien; Beyer, Gerald; Dentoni Litta, Eugenio; Beyne, Eric; Horiguchi, Naoto (2022) -
SRAM with buried power distribution to improve write margin and performance in advanced technology nodes
Salahuddin, Shairfe Muhammad; Shaik, Khaja Ahmad; Gupta, Anshul; Chava, Bharani; Gupta, Mohit; Weckx, Pieter; Ryckaert, Julien; Spessot, Alessio (2019) -
Sub-100 nm2 cobalt interconnects
Dutta, Shibesh; Beyne, Sofie; Gupta, Anshul; Kundu, Shreya; Bender, Hugo; Van Elshocht, Sven; Jamieson, Geraldine; Vandervorst, Wilfried; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2018) -
Thermal stress-aware CMOS-SRAM partitioning in sequential 3-D technology
Salahuddin, Shairfe Muhammad; Dentoni Litta, Eugenio; Gupta, Anshul; Ritzenthaler, Romain; Schaekers, Marc; Everaert, Jean-Luc; Yu, Hao; Vandooren, Anne; Ryckaert, Julien; Na, Myung Hee; Spessot, Alessio (2020) -
Three-layer BEOL process integration with supervia and self-aligned-block options for the 3nm node
Vega Gonzalez, Victor; Wilson, Chris; Briggs, Basoene; Decoster, Stefan; Versluijs, Janko; Lesniewska, Alicja; Paolillo, Sara; Baert, Rogier; Puliyalil, Harinarayanan; Bekaert, Joost; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Teugels, Lieve; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Gupta, Anshul; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; Dupas, Luc; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Debacker, Peter; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Dillemans, Leander; Chen, Yi-Fan; Tokei, Zsolt (2019) -
Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N
Pokhrel, Ankit; Gupta, Anshul; Kim, Min-Soo; Soulie, Jean-Philippe; Sarkar, Sujan Kumar; Canvel, Yann; Renaud, Vincent; Kenens, Bart; Hodges, Blake; Josephsen, Trent; O'Neal, Sabine; Herr, Quentin; Herr, Anna; Tokei, Zsolt (2023) -
Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18
Marti, Giulio; Pokhrel, Ankit; Murdoch, Gayle; Delie, Gilles; Gupta, Anshul; Marien, Philippe; Lesniewska, Alicja; Decoster, Stefan; Kundu, Souvik; Le, Quoc Toan; Oniki, Yusuke; Kenens, Bart; Hermans, Yannick; Park, Seongho; Tokei, Zsolt (2023)