Browsing by author "Geypen, Jef"
Now showing items 21-40 of 47
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Influence of the highly-doped drain implantation and the window size on defect creation in p/n Si1-xGex source/drain junctions
Chowdhury, Mohammad Kamruzzaman; Vissouvanadin Soubaretty, Bertrand; Bargallo Gonzalez, Mireia; Bhouri, Nada; Verheyen, Peter; Hikavyy, Andriy; Richard, Olivier; Geypen, Jef; Bender, Hugo; Loo, Roger; Claeys, Cor; Simoen, Eddy; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2008) -
Interplay between dry etch and wet clean in patterning La2O3/HfO2-containing high-k/metal gate stacks
Vos, Ingrid; Hellin, David; Vrancken, Christa; Geypen, Jef; Bender, Hugo; Vecchio, Emma; Paraschiv, Vasile; Vertommen, Johan; Boullart, Werner (2009) -
MBE growth investigations of InxGa1-xAs/GaAsySb1-y systems for TFET performance prediction
El Kazzi, Salim; Smets, Quentin; Rooyackers, Rita; Delmotte, Joris; Geypen, Jef; Verhulst, Anne; Collaert, Nadine; Heyns, Marc; Merckling, Clement; Thean, Aaron (2015) -
Performance and reliability of high-mobility Si0.55Ge0.45 p-channel FinFETs based on epitaxial cladding of Si fins
Mertens, Hans; Ritzenthaler, Romain; Hikavyy, Andriy; Franco, Jacopo; Lee, Jae Woo; Brunco, David; Eneman, Geert; Witters, Liesbeth; Mitard, Jerome; Kubicek, Stefan; Devriendt, Katia; Tsvetanova, Diana; Milenin, Alexey; Vrancken, Christa; Geypen, Jef; Bender, Hugo; Groeseneken, Guido; Vandervorst, Wilfried; Barla, Kathy; Collaert, Nadine; Horiguchi, Naoto; Thean, Aaron (2014) -
Process control & integration options of RMG Technology for aggressively scaled devices
Veloso, Anabela; Higuchi, Yuichi; Chew, Soon Aik; Devriendt, Katia; Ragnarsson, Lars-Ake; Sebaai, Farid; Schram, Tom; Brus, Stephan; Vecchio, Emma; Kellens, Kristof; Rohr, Erika; Eneman, Geert; Simoen, Eddy; Cho, Moon Ju; Paraschiv, Vasile; Crabbe, Yvo; Shi, Xiaoping; Tielens, Hilde; Van Ammel, Annemie; Dekkers, Harold; Favia, Paola; Geypen, Jef; Bender, Hugo; Phatak, Anup; del Agua Borniquel, Jose Ignacio; Xu, K.; Allen, M.; Liu, C.; Xu, T.; Yoo, W.S.; Thean, Aaron; Horiguchi, Naoto (2012) -
Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
Vega Gonzalez, Victor; Montero Alvarez, Daniel; Versluijs, Janko; Varela Pedreira, Olalla; Jourdan, Nicolas; Puliyalil, Harinarayanan; Chehab, Bilal; Peissker, Tobias; Haider, Ali; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Geypen, Jef; Le, Quoc Toan; Bazzazian, Nina; Heylen, Nancy; van der Veen, Marleen; El-Mekki, Zaid; Webers, Tomas; Vats, H.; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Gillijns, Werner; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Ciofi, Ivan; De Wachter, Bart; Swerts, Johan; Grieten, Eva; Ercken, Monique; Kim, Ryan Ryoung han; Croes, Kristof; Leray, Philippe; Jaysankar, Manoj; Nagesh, Nishanth; Ramakers, Leon; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Residue control in the removal of La2O3/HfO2 for high-k/metal gate formation: balancing plasma etch, strip and wet clean
Hellin, David; Vos, Ingrid; Geypen, Jef; Bender, Hugo; Paraschiv, Vasile; Boullart, Werner; Vertommen, Johan (2010) -
Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails
Veloso, Anabela; Jourdain, Anne; Radisic, Dunja; Chen, Rongmei; Arutchelvan, Goutham; O'Sullivan, Barry; Arimura, Hiroaki; Stucchi, Michele; De Keersgieter, An; Hosseini, Maryam; Hopf, Toby; D'have, Koen; Wang, Shouhua; Dupuy, Emmanuel; Mannaert, Geert; Vandersmissen, Kevin; Iacovo, Serena; Marien, Philippe; Choudhury, Subhobroto; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Zhou, X.; Gupta, Anshul; Schram, Tom; Briggs, Basoene; Lorant, Christophe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Geypen, Jef; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Soulie, Jean-Philippe; Devriendt, Katia; Chan, BT; Demuynck, Steven; Hiblot, Gaspard; Van der Plas, Geert; Ryckaert, Julien; Beyer, Gerald; Dentoni Litta, Eugenio; Beyne, Eric; Horiguchi, Naoto (2022) -
Selective epitaxial growth of Ge on silicon wafers with shallow trench isolation: an approach for Ge virual substrates
Wang, Gang; Leys, Frederik; Souriau, Laurent; Loo, Roger; Caymax, Matty; Brunco, D; Geypen, Jef; Bender, Hugo; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc (2008) -
Si-passivated Ge nMOS gate stack with low DIT and dipole-induced superior PBTI reliability using 3D-compatible ALD caps and high-pressure anneal
Arimura, Hiroaki; Cott, Daire; Loo, Roger; Vanherle, Wendy; Xie, Qi; Tang, Fu; Jiang, Xiaoqiang; Franco, Jacopo; Sioncke, Sonja; Ragnarsson, Lars-Ake; Chiu, Eddie; Lu, Xiaowan; Geypen, Jef; Bender, Hugo; Maes, Jan; Givens, Michael; Sibaja-Hernandez, Arturo; Wostyn, Kurt; Boccardi, Guillaume; Mitard, Jerome; Collaert, Nadine; Mocuta, Dan (2016) -
SiGe SEG growth for buried channel p-MOS devices
Hikavyy, Andriy; Loo, Roger; Witters, Liesbeth; Takeoka, Shinji; Geypen, Jef; Brijs, Bert; Merckling, Clement; Caymax, Matty; Dekoster, Johan (2009-10) -
SiGe SEG growth for buried channels p-MOS devices
Hikavyy, Andriy; Loo, Roger; Witters, Liesbeth; Takeoka, Shinji; Geypen, Jef; Brijs, Bert; Merckling, Clement; Caymax, Matty; Dekoster, Johan (2009) -
Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
Simoen, Eddy; Brugere, Antoine; Satta, Alessandra; Van Daele, Benny; Brijs, Bert; Richard, Olivier; Geypen, Jef; Meuris, Marc; Vandervorst, Wilfried (2008) -
Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
Simoen, Eddy; Brugere, Antoine; Satta, Alessandra; Van Daele, Benny; Brijs, Bert; Richard, Olivier; Geypen, Jef; Meuris, Marc; Vandervorst, Wilfried (2008) -
Structural analysis of TSVs
Bender, Hugo; Drijbooms, Chris; Van Marcke, Patricia; Geypen, Jef; Richard, Olivier; Favia, Paola (2010) -
Structural and electrical investigations of III-(As,Sb) Esaki diodes for BTBT evaluation in TFET devices
El Kazzi, Salim; Smets, Quentin; Rooyackers, Rita; Geypen, Jef; Verhulst, Anne; Collaert, Nadine; Heyns, Marc; Merckling, Clement; Thean, Aaron (2015) -
Structural characterization of through silicon vias (TSV)
Bender, Hugo; Drijbooms, Chris; Van Marcke, Patricia; Geypen, Jef; Philipsen, Harold; Radisic, Alex (2012) -
Study of deposition behavior of thermal/plasma-enhanced chemical vapor deposition (CVD/PECVD) of manganese on porous SiCOH low-k dielectric materials for copper diffusion barrier application in advanced interconnect technology
Jourdan, Nicolas; Baklanov, Mikhaïl; Meersschaut, Johan; Vereecke, Guy; Conard, Thierry; Wilson, Chris; Ablett, James; Fonda, Emiliano; Geypen, Jef; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt (2012) -
Study of ohmic contacts to n-type Ge: snowplow and laser activation
Firrincieli, Andrea; Martens, Koen; Rooyackers, Rita; Vincent, Benjamin; Rosseel, Erik; Simoen, Eddy; Geypen, Jef; Bender, Hugo; Claeys, Cor; Kittl, Jorge (2011) -
Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films
Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Baklanov, Mikhaïl; Detavernier, Christophe; De Feyter, Steven; Armini, Silvia (2014)