Browsing by author "Van Steenbergen, Jan"
Now showing items 21-36 of 36
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On the characterisation of grown-in defects in Czocharski-grown Si and Ge
Vanhellemont, Jan; Van Steenbergen, Jan; Holsteyns, Frank; Roussel, Philippe; Meuris, Marc; Mlynarczyk, K.; Spiewak, P.; Geens, Wim; Romandic, I. (2008) -
Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates
De Jaeger, Brice; Bonzom, Renaud; Leys, Frederik; Richard, Olivier; Van Steenbergen, Jan; Winderickx, Gillis; Van Moorhem, Els; Raskin, G.; Letertre, F.; Billon, T.; Meuris, Marc; Heyns, Marc (2005-06) -
Performance of a linear single wafer IPA vapour based drying system
Fyen, Wim; Arnauts, Sophia; Holsteyns, Frank; Doumen, Geert; Vereecke, Guy; Van Steenbergen, Jan; Mertens, Paul (2004) -
Performance of a linear single wafer IPA vapour based drying system
Fyen, Wim; Arnauts, Sophia; Holsteyns, Frank; Doumen, Geert; Vereecke, Guy; Van Steenbergen, Jan; Mertens, Paul (2005) -
Physical characterization of HfO2 deposited on Ge substrates by MOCVD
Van Elshocht, Sven; Brijs, Bert; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Kubicek, Stefan; Meuris, Marc; Onsia, Bart; Richard, Olivier; Teerlinck, Ivo; Van Steenbergen, Jan; Zhao, Chao; Heyns, Marc (2003) -
Physical characterization of HfO2 deposited on Ge substrates by MOCVD
Van Elshocht, Sven; Brijs, Bert; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Kubicek, Stefan; Meuris, Marc; Onsia, Bart; Richard, Olivier; Teerlinck, Ivo; Van Steenbergen, Jan; Zhao, Chao; Heyns, Marc (2004) -
Procedure to evaluate particle-substrate interaction during immersion in liquid
Fyen, Wim; Van Steenbergen, Jan; Xu, Kaidong; Vos, Rita; Mertens, Paul; Heyns, Marc (2003) -
Rinsing and drying issues during the post CMP cleaning process
Fyen, Wim; Xu, Kaidong; Van Steenbergen, Jan; Vereecke, Guy; Vos, Rita; Arnauts, Sophia; Rip, Jens; Kenis, Karine; Holsteyns, Frank; Hellin, David; Doumen, Geert; Mertens, Paul; Kraus, Harald; Lee, Kim (2004) -
Study of CVD high-k gate oxides on high-mobility Ge and Ge/Si substrates
Van Elshocht, Sven; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Hoflijk, Ilse; Houssa, Michel; Leys, Frederik; Bonzom, Renaud; De Jaeger, Brice; Van Steenbergen, Jan; Vandervorst, Wilfried; Heyns, Marc; Meuris, Marc (2005) -
Surface cleaning and preparation related aspects of the germanium surface chemistry
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Mertens, Paul; Meuris, Marc; Sioncke, Sonja; Theuwis, A.; Van Elshocht, Sven; Van Steenbergen, Jan; Vinckier, Chris (2004) -
Surface preparation techniques for high-k deposition on Ge substrates
Van Elshocht, Sven; Delabie, Annelies; Brijs, Bert; Caymax, Matty; Conard, Thierry; Onsia, Bart; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Zhao, Chao; Meuris, Marc; Heyns, Marc (2004) -
Surface preparation techniques for high-k deposition on Ge substrates
Van Elshocht, Sven; Delabie, Annelies; Brijs, Bert; Caymax, Matty; Conard, Thierry; Onsia, Bart; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Zhao, Chao; Meuris, Marc; Heyns, Marc (2005) -
The future of high-k on pure germanium and its importance for Ge CMOS
Meuris, Marc; Delabie, Annelies; Van Elshocht, Sven; Kubicek, Stefan; Verheyen, Peter; De Jaeger, Brice; Van Steenbergen, Jan; Winderickx, Gillis; Van Moorhem, Els; Purunen, Riikka; Brijs, Bert; Caymax, Matty; Conard, Thierry; Richard, Olivier; Vandervorst, Wilfried; Zhao, Chao; De Gendt, Stefan; Schram, Tom; Chiarella, Thomas; Onsia, Bart; Teerlinck, I; Mertens, Paul; Raskin, G; Mijlemans, P; Biesemans, Serge; Heyns, Marc (2004) -
The future of high-k on pure germanium and its importance for Ge CMOS
Meuris, Marc; Delabie, Annelies; Van Elshocht, Sven; Kubicek, Stefan; Verheyen, Peter; De Jaeger, Brice; Van Steenbergen, Jan; Winderickx, Gillis; Van Moorhem, Els; Puurunen, R.; Brijs, Bert; Caymax, Matty; Conard, Thierry; Richard, Olivier; Vandervorst, Wilfried; Zhao, Chao; De Gendt, Stefan; Schram, Tom; Chiarella, Thomas; Onsia, Bart; Teerlinck, I; Houssa, Michel; Mertens, Paul; Raskin, G.; Mijlemans, P.; Biesemans, Serge; Heyns, Marc (2005) -
VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Van Steenbergen, Jan; Raskin, Geoffroy; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2004) -
VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Hellin, David; Geens, V.; Teerlinck, Ivo; Van Steenbergen, Jan; Rip, Jens; Laureyn, Wim; Raskin, Geoffroy; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2005)