Browsing by author "Teerlinck, Ivo"
Now showing items 41-49 of 49
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State-of-the art cleaning in semiconductor manufacturing
Mertens, Paul; Arnauts, Sophia; Bearda, Twan; Eitoku, Atsuro; Fyen, Wim; Hellin, David; Holsteyns, Frank; Kesters, Els; Kraus, Harald; Lee, Kuntack; Onsia, Bart; Rip, Jens; Schmidt, H.; Snow, Jim; Teerlinck, Ivo; Vereecke, Guy; Vos, Rita; Xu, Kaidong; Heyns, Marc (2003) -
Surface cleaning issues in thin-oxide technology
Mertens, Paul; Bearda, Twan; Houssa, Michel; Loewenstein, Lee; Teerlinck, Ivo; De Gendt, Stefan; Vos, Rita; Kenis, Karine; Naili, Mohamed; Heyns, Marc (1999) -
The etching mechanisms of SiO2 in hydrofluoric acid
Verhaverbeke, Steven; Teerlinck, Ivo; Vinckier, Chris; Stevens, G.; Cartuyvels, Rudi; Heyns, Marc (1994) -
The IMEC Clean: implementation in advanced CMOS manufacturing
Meuris, Marc; Arnauts, Sophia; Cornelissen, Ingrid; Kenis, Karine; Lux, Marcel; De Gendt, Stefan; Mertens, Paul; Teerlinck, Ivo; Vos, Rita; Loewenstein, Lee; Heyns, Marc (2000) -
The IMEC-Clean: A clean for advanced CMOS manufacturing
Meuris, Marc; Arnauts, Sophia; Cornelissen, Ingrid; Kenis, Karine; Lux, Marcel; De Gendt, Stefan; Mertens, Paul; Teerlinck, Ivo; Vos, Rita; Loewenstein, Lee; Heyns, Marc; Wolke, K. (2000) -
The reduction of hydrogen peroxide at silicon surfaces in HF solutions
Teerlinck, Ivo; Gomes, W.; Strubbe, K.; Mertens, Paul; Heyns, Marc (1999) -
Ultra thin gate oxide technology and reliability
Heyns, Marc; Depas, Michel; Teerlinck, Ivo; Meuris, Marc; Mertens, Paul; Vanhellemont, Jan; Mouche, Laurent; Nigam, Tanya; Wilhelm, Rudi; Knotter, Martin; Wolke, K.; Crossley, A.; Sofield, C. J.; Gräf, D. (1996) -
VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Van Steenbergen, Jan; Raskin, Geoffroy; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2004) -
VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Hellin, David; Geens, V.; Teerlinck, Ivo; Van Steenbergen, Jan; Rip, Jens; Laureyn, Wim; Raskin, Geoffroy; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2005)