Browsing Conference contributions by author "Rakhimova, T."
Now showing items 1-4 of 4
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Comparison between vacuum ultra-violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching
Zotovich, A.; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, O.; Lopaev, D.; Rakhimova, T.; Baklanov, Mikhaïl (2015) -
Effect of VUV and EUV radiation on utra low-k materials damage
Braginsky, O.; Kovalev, A.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Zyryanov, S.; Baklanov, Mikhaïl (2013) -
F atoms interaction with nanoporous OSG low-k materials
Rakhimova, T.; Rakhimov, A.; Zyryanov, S.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Novikova, N.; Kurchikov, K.; Baklanov, Mikhaïl (2014) -
Ultra low-k dielectrics damage under VUV and EUV radiation
Zyryanov, S.; Braginsky, O.; Kovaev, A.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Baklanov, Mikhaïl (2012)