Browsing Conference contributions by author "Rakhimova, Tatyana"
Now showing items 1-4 of 4
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1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures
Proshina, Olga; Rakhimova, Tatyana; Baklanov, Mikhaïl (2013) -
Dry cleaning and doping of MX2 for contact engineering
Marinov, Daniil; Ludwig, Jonathan; Chiappe, Daniele; Voronina, Ekaterina; Rakhimova, Tatyana; de Marneffe, Jean-Francois; Asselberghs, Inge; De Gendt, Stefan (2018) -
Dry cleaning of WS2 using reducing downstream plasma
de Marneffe, Jean-Francois; Marinov, Daniil; Zhang, Jianran; With, Patrick; Smets, Quentin; Arutchelvan, Goutham; Voronina, E.; Mankelevitch, Yuri; Rakhimova, Tatyana; Bal, Kristof; Asselberghs, Inge; De Gendt, Stefan (2019) -
Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
Zyulkov, Ivan; Voronina, Ekaterina; Chan, BT; Rakhimova, Tatyana; De Gendt, Stefan; Armini, Silvia (2019)