Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

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Authors

Deng, Kerong; Erofeev, Ivan; Chowdhuri, Angshuman Ray; Philipsen, Harold; Aabdin, Zainul; Hartanto, Antony Winata; Tjiu, Weng Weei; Zhang, Mingsheng; Fernando, Devshan; Saidov, Khakimjon; Kumar, Krishna; Pacco, Antoine; Holsteyns, Frank; Huynh, Han Vinh; Mirsaidov, Utkur

DOI

10.1002/smll.202406713

ISSN

1613-6810

PMID

MEDLINE:39439137

Issue

51

Journal

SMALL

Volume

20

Title

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Publication type

Journal article

Embargo date

9999-12-31

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