N2 Nanosheet Pathfinding-PDK (P-PDKTM) Including Back-Side PDN

Abstract

Connecting the circuit design ecosystem to the semiconductor technology roadmap has never been more essential than it is today. With scaling limitations leading to disruptive technological innovations, profound Design-Technology Co-Optimization and new design methodologies are required. Early Process Design Kits (PDKs) serve as fundamental tools in facilitating this pursuit. This paper introduces the imec N2 design Pathfinding PDK (P-PDK) built on imec logic roadmap experience. The N2 P-PDK features Nanosheet devices with both wafer front- and back-side power connectivity, at projected performance and within industrial process capability.