Browsing Articles by imec author "588f3e4029b46978348279bdc8cc25d62ceba1e7"

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    • BEOLC compatiblehigh tunnel magneto resistance perpendicula magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap 

      Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Tomczak, Yoann; Sankaran, Kiroubanand; Pourtois, Geoffrey; Kim, Woojin; Meersschaut, Johan; Souriau, Laurent; Radisic, Dunja; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2015)

    • Buried power rail integration with FinFETs for ultimate CMOS scaling 

      Gupta, Anshul; Varela Pedreira, Olalla; Arutchelvan, Goutham; Zahedmanesh, Houman; Devriendt, Katia; Hanssen, Frederik; Tao, Zheng; Ritzenthaler, Romain; Wang, Shouhua; Radisic, Dunja; Kenis, Karine; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; Jourdan, Nicolas; Chan, BT; Subramanian, Sujith; Schleicher, Filip; Hopf, Toby; Peter, Antony; Rassoul, Nouredine; Debruyn, Haroen; Demonie, Ingrid; Siew, Yong Kong; Chiarella, Thomas; Briggs, Basoene; Zhou, Daisy; Rosseel, Erik; De Keersgieter, An; Capogreco, Elena; Dentoni Litta, Eugenio; Boccardi, Guillaume; Baudot, Sylvain; Mannaert, Geert; Bontemps, Noemie; Sepulveda Marquez, Alfonso; Mertens, Sofie; Kim, Min-Soo; Dupuy, Emmanuel; Vandersmissen, Kevin; Paolillo, Sara; Cousserier, Joris; Yakimets, Dmitry; Lazzarino, Frederic; Chehab, Bilal; Favia, Paola; Drijbooms, Chris; Jaysankar, Manoj; Morin, Pierre; Altamirano Sanchez, Efrain; Mitard, Jerome; Wilson, Chris; Holsteyns, Frank; Boemmels, Juergen; Demuynck, Steven; Tokei, Zsolt; Horiguchi, Naoto (2020)

    • Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium 

      Popovici, Mihaela Ioana; Swerts, Johan; Tomida, Kazuyuki; Radisic, Dunja; Kim, Min-Soo; Kaczer, Ben; Richard, Olivier; Bender, Hugo; Delabie, Annelies; Moussa, Alain; Vrancken, Christa; Opsomer, Karl; Franquet, Alexis; Pawlak, Malgorzata; Schaekers, Marc; Altimime, Laith; Van Elshocht, Sven; Kittl, Jorge (2011)

    • Degradation of 248nm deep UV photoresist by ion implantation 

      Tsvetanova, Diana; Vos, Rita; Vereecke, Guy; Parac-Vogt, Tatjana; Clemente, Francesca; Vanstreels, Kris; Radisic, Dunja; Conard, Thierry; Franquet, Alexis; Jivanescu, M.; Nguyen, D. A. P.; Stesmans, Andre; Brijs, Bert; Mertens, Paul; Heyns, Marc (2011)

    • In-line control of Si loss after post ion implantation strip 

      Shamiryan, Denis; Radisic, Dunja; Boullart, Werner (2010)

    • Interconnected magnetic tunnel junctions for spin-logic applications 

      Manfrini, Mauricio; Vaysset, Adrien; Wan, Danny; Raymenants, Eline; Swerts, Johan; Rao, Siddharth; Zografos, Odysseas; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Radisic, Dunja; Cupak, Miroslav; Dehan, Morin; Sayan, Safak; Nikonov, Dmitry E.; Manipatruni, Sasikanth; Young, Ian A.; Mocuta, Dan; Radu, Iuliana (2018)

    • Metrology for implanted Si substrate loss studies 

      Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo; Sonnemans, Roger; Berry, Ivan (2010)

    • Non-oxidizing solvent-based strip of ion implanted photoresist 

      Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, J; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2012)

    • Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent 

      Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, James; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2011)

    • Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails 

      Veloso, Anabela; Jourdain, Anne; Radisic, Dunja; Chen, Rongmei; Arutchelvan, Goutham; O'Sullivan, Barry; Arimura, Hiroaki; Stucchi, Michele; De Keersgieter, An; Hosseini, Maryam; Hopf, Toby; D'have, Koen; Wang, Shouhua; Dupuy, Emmanuel; Mannaert, Geert; Vandersmissen, Kevin; Iacovo, Serena; Marien, Philippe; Choudhury, Subhobroto; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Zhou, X.; Gupta, Anshul; Schram, Tom; Briggs, Basoene; Lorant, Christophe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Geypen, Jef; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Soulie, Jean-Philippe; Devriendt, Katia; Chan, BT; Demuynck, Steven; Hiblot, Gaspard; Van der Plas, Geert; Ryckaert, Julien; Beyer, Gerald; Dentoni Litta, Eugenio; Beyne, Eric; Horiguchi, Naoto (2022)

    • Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions 

      Le, Quoc Toan; Arslan, Esen; Rip, Jens; De Coster, Hanne; Verdonck, Patrick; Radisic, Dunja; Schleicher, Filip; Vaesen, Inge; Conard, Thierry; Altamirano Sanchez, Efrain (2023)

    • Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing 

      Hellings, Geert; Rosseel, Erik; Simoen, Eddy; Radisic, Dunja; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmer; Zschaetzsch, Gerd; Nazir, Aftab; Clarysse, Trudo; Vandervorst, Wilfried; Hoffmann, Thomas Y.; De Meyer, Kristin (2011)