Browsing Articles by imec author "910728846e70c8f06dfa34140aba472b8c6458dc"
Now showing items 1-20 of 26
-
A CAD-oriented analytical model for frequency-dependent series resistance and inductance of microstrip on-chip interconnect on silicon substrate
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; Vandenberghe, S.; De Roest, David (2002) -
A new approach for the calculation of line capacitances of two-layer IC interconnects
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David (2000) -
A physics-based VLSI interconnect model including substrate and conductor skin effects
Ymeri, H.; Nauwelaers, Bart; Maex, Karen; De Roest, David (2004) -
Accurate analytic expressions for frequency-dependent inductance and resistance of single on-chip interconnects on conductive silicon Substrate
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David; Vandenberghe, S. (2002) -
Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Caluwaerts, Rudy; Tsuji, Naoto; Matsushita, Kiyohiro; Kemeling, Nathan; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007) -
Dielectric reliability of 50nm half pitch structures in Aurora® LK
Demuynck, Steven; Kim, Honggun; Huffman, Craig; Darnon, Maxime; Struyf, Herbert; Versluijs, Janko; Claes, Martine; Vereecke, Guy; Verdonck, Patrick; Volders, Henny; Heylen, Nancy; Kellens, Kristof; De Roest, David; Sprey, Hessel; Beyer, Gerald (2009) -
Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
Marsik, Premysl; Urbanowicz, Adam; Verdonck, Patrick; De Roest, David; Sprey, Hessel; Baklanov, Mikhaïl (2011) -
Electrical characteristics of P-type bulk Si fin field-effect transistor using solid-source doping with 1-nm phosphosilicate glass
Kikuchi, Yoshiaki; Chiarella, Thomas; De Roest, David; Blanquart, Timothee; De Keersgieter, An; Kenis, Karine; Peter, Antony; Ong, Patrick; Van Besien, Els; Tao, Zheng; Kim, Min-Soo; Kubicek, Stefan; Chew, Soon Aik; Schram, Tom; Demuynck, Steven; Mocuta, Anda; Mocuta, Dan; Horiguchi, Naoto (2016) -
Fast and accurate analysis of the multiconductor interconnects
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David (2001) -
Frequency-dependent expressions for inductance and resistance of microstrip line on silicon substrate
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David; Vandenberghe, S. (2002) -
Frequency-dependent line capacitance and conductance calculations of on-chip interconnects on silicon substrate using Fourier cosine series approach
Ymeri, Hasan; Nauwelaers, Bart; Vandenberghe, S.; Maex, Karen; De Roest, David; Stucchi, Michele (2001) -
Highly accurate closed form approximation for frequency-dependent line impedance of a lossy silicon substrate IC interconnect
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David; Stucchi, Michele (2002) -
Influence of porosity on electrical properties of low-k dielectrics
Van Besien, Els; Pantouvaki, Marianna; Zhao, Larry; De Roest, David; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2012) -
Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materials
Verdonck, Patrick; Van Besien, Els; Vanstreels, Kris; Trompoukis, Christos; Urbanowicz, Adam; De Roest, David; Baklanov, Mikhaïl (2011) -
Integration and dielectric reliability of 30nm ½ pitch structures in Aurora® LK HM
Demuynck, Steven; Huffman, Craig; Claes, Martine; Suhard, Samuel; Versluijs, Janko; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Croes, Kristof; Struyf, Herbert; Vereecke, Guy; Verdonck, Patrick; De Roest, David; Beynet, Julien; Sprey, Hessel; Beyer, Gerald (2010) -
Integration of Cu and low-K dielectrics: effect of hard mask and dry etch on electrical performance of damascene structures
Donaton, R. A.; Coenegrachts, Bart; Maenhoudt, Mireille; Pollentier, Ivan; Struyf, Herbert; Vanhaelemeersch, Serge; Vos, I.; Meuris, Marc; Fyen, Wim; Beyer, Gerald; Tokei, Zsolt; Stucchi, Michele; Vervoort, Iwan; De Roest, David; Maex, Karen (2001) -
New approach for calculation of line parameters of IC interconnects
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David (2001) -
New modeling approach of on-chip interconnects for RF integrated circuits in CMOS technology
Ymeri, H.; Nauwelaers, Bart; Maex, Karen; De Roest, David (2003) -
Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
Marsik, P.; Verdonck, Patrick; De Roest, David; Baklanov, Mikhaïl (2010) -
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Baryshnikova, Marina; De Simone, Danilo; Knaepen, Werner; Kachel, Krzysztof; Chan, BT; Paolillo, Sara; Maes, Jan; De Roest, David; Rincon Delgadillo, Paulina; Vandenberghe, Geert (2017)