Browsing Presentations by imec author "1b2beaaf90c38b0335f7766176a4fb72c1a2fa05"
Now showing items 1-12 of 12
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15nm half-pitch patterning: EUV + SELF-aligned double patterning
Versluijs, Janko; Souriau, Laurent; Hellin, David; Orain, Isabelle; Kimura, Yoshie; Kunnen, Eddy; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Wiaux, Vincent; Xu, Kaidong (2012) -
A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Rip, Jens; Theuwis, Antoon; De Gendt, Stefan; Vinckier, Chris (2004) -
Advanced wafer surface cleaning technology
Mertens, Paul; Vos, Rita; Vereecke, Guy; Arnauts, Sophia; Bearda, Twan; De Waele, Rita; Eitoku, Atsuro; Fyen, Wim; Geckiere, J.; Hellin, David; Holsteyns, Frank; Kesters, Els; Claes, Martine; Kenis, Karine; Kraus, Harald; Malhouitre, Stephane; Lee, Kuntack; Kocsis, Michael; Onsia, Bart; Garaud, Sylvain; Rip, Jens; Snow, Jim; Teerlinck, I.; Van Hoeymissen, Jan; Barbagini, Francesca; Xu, Kaidong; Paraschiv, Vasile; De Gendt, Stefan; Mannaert, Geert; Heyns, Marc (2004) -
Fin bending in dimensional scaling
Zhang, Liping; Hellin, David; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Lazzarino, Frederic; Morin, Pierre; Wang, Shouhua; Hopf, Toby; Kenis, Karine; Lorant, Christophe; Sebaai, Farid; Batuk, Dmitry; Briggs, Basoene; Mertens, Hans; Demuynck, Steven (2020) -
Physico-chemical study of probe immobilisations for immunosensing applications
Laureyn, Wim; Frederix, Filip; Köhn, F.; Hellin, David; Ceulemans, Griet; Maes, Guido (2000) -
Saturation effects in total reflection X-ray spectrometry on microdroplet samples
De Gendt, Stefan; Vinckier, Chris; Hellin, David (2003) -
Saturation effects in TXRF on micro-droplet residues
Hellin, David; De Gendt, Stefan; Mertens, Paul; Vinckier, Chris (2004) -
State-of-the art cleaning in semiconductor manufacturing
Mertens, Paul; Arnauts, Sophia; Bearda, Twan; Eitoku, Atsuro; Fyen, Wim; Hellin, David; Holsteyns, Frank; Kesters, Els; Kraus, Harald; Lee, Kuntack; Onsia, Bart; Rip, Jens; Schmidt, H.; Snow, Jim; Teerlinck, Ivo; Vereecke, Guy; Vos, Rita; Xu, Kaidong; Heyns, Marc (2003) -
Thin epitaxial Si film growth at low temperatures for germanium processing applications
Bonzom, Renaud; Leys, Frederik; Hellin, David; Loo, Roger; Caymax, Matty; Vandervorst, Wilfried (2005) -
Validatie van methoden voor metaalcontaminatie analysemethoden op halfgeleidersubstraten
Hellin, David; Rip, Jens; Arnauts, Sophia; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2004) -
Validation of vapor phase decomposition - Total reflection X-ray fluorescence spectrometry for metallic contamination analysis of Si wafers
De Gendt, Stefan; Vinckier, Chris; Hellin, David (2003) -
VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Van Steenbergen, Jan; Raskin, Geoffroy; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2004)