Browsing Presentations by imec author "4fad856b56821e8649e16bb03886b2c25c5b218a"
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Applications of dynamic surface annealing for high-performance Si and Ge based MOS devices
Rosseel, Erik; Everaert, Jean-Luc; Hikavyy, Andriy; Witters, Liesbeth; Mitard, Jerome; Vandervorst, Wilfried (2011) -
Growth of high Ge content SiGe on (110) oriented Si wafers
Hikavyy, Andriy; Vanherle, Wendy; Dekoster, Johan; Bender, Hugo; Moussa, Alain; Witters, Liesbeth; Hoffman, T.; Loo, Roger (2011) -
III-V and germanium FinFET devices integrated on a 300mm Si platform
Collaert, Nadine; Waldron, Niamh; Merckling, Clement; Witters, Liesbeth; Loo, Roger; Mitard, Jerome; Pourghaderi, Mohammad Ali; Eneman, Geert; Barla, Kathy; Thean, Aaron (2014) -
Nano-beam diffraction investigation of the strain evolution in SiGe channel pFETs with gate first or gate last process
Favia, Paola; Eneman, Geert; Yamaguchi, Shinpei; Witters, Liesbeth; Bender, Hugo (2012) -
New opportunities in device scaling: How the high performing strained Ge pFINFET can help the space industry?
Mitard, Jerome; Witters, Liesbeth; Collaert, Nadine; Linten, Dimitri; Eneman, Geert; Claeys, Cor; Heyns, Marc; Mocuta, Anda; Thean, Aaron (2016) -
Post extension ion implant photo resist strip for 32 nm technology and beyond
Mannaert, Geert; Witters, Liesbeth; Shamiryan, Denis; Boullart, Werner; Han, Keping; Luo, Shiian; Falepin, Annelies; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo (2008) -
SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
Ohashi, Takeyoshi; Hasumi, Kazuhisa; Masami, Ikota; Lorusso, Gian; Mertens, Hans; Witters, Liesbeth; Horiguchi, Naoto (2019)