Browsing Presentations by imec author "8825b3453e7078cde6011fdf74777c88380930af"
Now showing items 1-20 of 22
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Anodized alumina with tailored pore architectures
Abd-Elnaiem, Alaa; Huyghebaert, Cedric; Gaffar, Mohamed; Vereecken, Philippe (2012) -
Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor
Eneman, Geert; Delabie, Annelies; Van Elshocht, Sven; De Jaeger, Brice; Nicholas, Gareth; Martens, Koen; Brunco, David; Zimmerman, Paul; Houssa, Michel; Pourtois, Geoffrey; Kaczer, Ben; Leys, Frederik; Winderickx, Gillis; Huyghebaert, Cedric; Terzieva, Valentina; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Build-up of the altered layer as function of the ion-fluency in Si-Ge
Huyghebaert, Cedric; Brijs, Bert; Vandervorst, Wilfried (2000) -
Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Characterization of grain boundaries and impact of plasma-induced patterned in 2D materials
Celano, Umberto; Virkki, Olli; Chiappe, Daniele; Heyne, Markus; Hoflijk, Ilse; Franquet, Alexis; Huyghebaert, Cedric; Paredis, Kristof; De Gendt, Stefan; Radu, Iuliana; Vandervorst, Wilfried (2017) -
Electrical characterization of the metal-vanadium dioxide interface and implications for memory applications
Martens, Koen; Radu, Iuliana; Mertens, Sofie; Shi, Xiaoping; Schaekers, Marc; Tielens, Hilde; Huyghebaert, Cedric; De Gendt, Stefan; Jurczak, Gosia; Afanasev, Valeri; Heyns, Marc; Kittl, Jorge (2011) -
Electrochemical characterization of lithiation and de-lithiation of ultra-thin amorphous TiO2 films
Moitzheim, Sebastien; Deng, Shaoren; Huyghebaert, Cedric; Detavernier, Christophe; De Gendt, Stefan; Vereecken, Philippe (2014) -
Heavy ion implantation in Ge: dramatic radiation induced morphology in Ge
Janssens, Tom; Huyghebaert, Cedric; Vanhaeren, Danielle; Winderickx, Gillis; Satta, Alessandra; Meuris, Marc; Vandervorst, Wilfried (2005) -
Interfacial B-profiling: an (un)solvable problem with SIMS
Vandervorst, Wilfried; Janssens, Tom; Huyghebaert, Cedric; Brijs, Bert; Fruehauf, Jens (2002) -
Ion beam analysis: the past, the present and the future
Brijs, Bert; Huyghebaert, Cedric; Vandervorst, Wilfried (2002) -
Ionization probability changes of the Si+ ions during the transient for 3 keV O2+ bombardment of Si
Huyghebaert, Cedric; Janssens, Tom; Brijs, Bert; Vandervorst, Wilfried (2001) -
Manganese dioxide coated 3D silicon pillars for lithium-ion battery applications
Etman, Ahmed; Radisic, Alex; Emara, Mahmoud; Huyghebaert, Cedric; Vereecken, Philippe (2012) -
Material-selective doping of 2D TMDC through AlxOy encapsulation
Leonhardt, Alessandra; Chiappe, Daniele; El Kazzi, Salim; Afanasiev, Valeri; Conard, Thierry; Franquet, Alexis; Huyghebaert, Cedric; De Gendt, Stefan (2019) -
On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS
Janssens, Tom; Huyghebaert, Cedric; Vandervorst, Wilfried; Gildenpfennig, A.; Brongersma, H. (2001) -
Optical testing of EUV pellicle materials
Pollentier, Ivan; Vanpaemel, Johannes; Zahedmanesh, Houman; Adelmann, Christoph; Huyghebaert, Cedric; Gallagher, Emily; Brose, Sasha; Danylyuk, Serhij; Bergmann, Klaus (2015) -
Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2001) -
SIMS-profiling of Boron: fundamentals and practical applications
Janssens, Tom; Huyghebaert, Cedric; Brijs, Bert; Geenen, Luc; Conard, Thierry; Vandervorst, Wilfried (2002) -
Sputter yields and Ge migration in oxygen-bombarded SiGe
Huyghebaert, Cedric; Brijs, Bert; Janssens, Tom; Vandervorst, Wilfried (2002) -
Sulfurization of metallic and oxidized molybdenum thin films
Heyne, Markus; Chiappe, Daniele; Meersschaut, Johan; Nuytten, Thomas; Conard, Thierry; Bender, Hugo; Huyghebaert, Cedric; Radu, Iuliana; de Marneffe, Jean-Francois; Neyts, Erik C.; De Gendt, Stefan (2016) -
Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence SiGe
Huyghebaert, Cedric; Brijs, Bert; Vandervorst, Wilfried (2001)