Browsing Presentations by imec author "987cf974b4c26298c72716befc7493d33d4080c3"
Now showing items 1-20 of 95
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A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Rip, Jens; Theuwis, Antoon; De Gendt, Stefan; Vinckier, Chris (2004) -
A novel resist and post-etch residue removal process using ozonated chemistry
De Gendt, Stefan; Snee, Peter; Cornelissen, Ingrid; Lux, Marcel; Vos, Rita; Mertens, Paul; Knotter, Martin; Meuris, Marc; Heyns, Marc (1998) -
A study of the influence of typical wet chemical treatments on the germanium wafer surface
Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, I; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris (2004) -
Acquiring insights in the synthesis of an aqueous citrato-oxovanadate(IV) precursor by magnetic resonance techniques
Peys, Nick; Van Doorslaer, S.; Adriaensens, P.; De Gendt, Stefan; Hardy, An; Van Bael, Marlies (2012) -
Advanced cleaning and ultra-thin oxide technology
Heyns, Marc; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Knotter, D. M.; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1998) -
Advanced surface preparation leading into the nano-era
Onsia, Bart; De Gendt, Stefan; Delabie, Annelies; Van Elshocht, Sven; Caymax, Matty; Conard, Thierry; Heyns, Marc; Lin, S.; Green, Martin; Tsai, Wilman (2003) -
Advanced wafer surface cleaning technology
Mertens, Paul; Vos, Rita; Vereecke, Guy; Arnauts, Sophia; Bearda, Twan; De Waele, Rita; Eitoku, Atsuro; Fyen, Wim; Geckiere, J.; Hellin, David; Holsteyns, Frank; Kesters, Els; Claes, Martine; Kenis, Karine; Kraus, Harald; Malhouitre, Stephane; Lee, Kuntack; Kocsis, Michael; Onsia, Bart; Garaud, Sylvain; Rip, Jens; Snow, Jim; Teerlinck, I.; Van Hoeymissen, Jan; Barbagini, Francesca; Xu, Kaidong; Paraschiv, Vasile; De Gendt, Stefan; Mannaert, Geert; Heyns, Marc (2004) -
Alternative gate insulator materials for future generation MOSFETs
Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Jos; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, R.; Wilhelm, Rudi; Young, Edward; Zhao, Chao (2001) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Alternative patterning mechanisms for Extreme Ultraviolet Lithography
Vesters, Yannick; De Simone, Danilo; De Gendt, Stefan (2018) -
An atomistic view of a nanoelectronic world
Pourtois, Geoffrey; Clima, Sergiu; Sankaran, Kiroubanand; Mees, Maarten; De Gendt, Stefan; Heyns, Marc (2012) -
Aqueous chemical solution deposition of LuFeO3 thin films in view of energy storage applications
Gielis, Sven; Peys, Nick; Dewulf, Daan; De Dobbelaere, C.; Pavlovic, N.; Damm, H.; Van Elshocht, Sven; De Gendt, Stefan; Vereecken, Philippe; Hardy, An; Van Bael, Marlies (2011) -
Aqueous chemical solution deposition of LuFeO3 thin high-k films
Gielis, Sven; Peys, Nick; Dewulf, D.; Pavlovic, N.; Van Elshocht, Sven; De Gendt, Stefan; Hardy, An; Van Bael, Marlies (2012) -
Aqueous citrato-oxovanadate(IV) precursor for the deposition of VOx nanostructures
Peys, Nick; Gielis, S.; Dewulf, D.; De Gendt, Stefan; Hardy, An; Van Bael, Marlies (2012) -
Behaviour of metallic contaminants during MOS processing
Bearda, Twan; De Gendt, Stefan; Loewenstein, Lee; Knotter, Martin; Mertens, Paul; Heyns, Marc (1998) -
Beyond CMOS technologies: from nanowires to graphene
Claeys, Cor; Vereecke, Guy; De Gendt, Stefan (2009) -
Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
De Smedt, Frank; Vankerckhoven, Hans; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2002) -
Capturing wetting states in nanopatterned silicon
Xu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; Struyf, Herbert; Holsteyns, Frank; De Gendt, Stefan (2013) -
Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Catalyzed CVD growth of carbon nanotubes
van der Veen, Marleen; Cirillo, Marco; Chiodarelli, Nicolo; De Henau, Katia; Riskin, Alexander; Van Bael, Marlies; Hens, Zeger; De Gendt, Stefan; Vereecken, Philippe (2009)