Browsing Presentations by imec author "987cf974b4c26298c72716befc7493d33d4080c3"
Now showing items 21-40 of 95
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Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Besling, Wim; Young, Edward; Conard, Thierry; Zhao, Chao; Vandervorst, Wilfried; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko; Haukka, S. (2001) -
Characterization of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy
Nohira, Hiroshi; Tsai, Wilman; Besling, Wim; Young, Edward; Pétry, Jasmine; Conard, Thierry; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko (2001) -
Characterization of grain boundaries and impact of plasma-induced patterned in 2D materials
Celano, Umberto; Virkki, Olli; Chiappe, Daniele; Heyne, Markus; Hoflijk, Ilse; Franquet, Alexis; Huyghebaert, Cedric; Paredis, Kristof; De Gendt, Stefan; Radu, Iuliana; Vandervorst, Wilfried (2017) -
Characterization of high-k films grown by atomic layer deposition
Vandervorst, Wilfried; Conard, Thierry; Petry, Jasmine; Brijs, Bert; Bender, Hugo; Richard, Olivier; Caymax, Matty; De Gendt, Stefan; Green, Martin; Cartier, Eduard; Copel, M. (2002) -
Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
Kerber, Andreas; Cartier, Eduard; Degraeve, Robin; Roussel, Philippe; Pantisano, Luigi; Kauerauf, Thomas; Groeseneken, Guido; De Gendt, Stefan; Heyns, Marc (2002) -
Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Zhao, Chao; Richard, Olivier; Bender, Hugo; Houssa, Michel; Carter, Richard; De Gendt, Stefan; Heyns, Marc; Young, Edward; Tsai, Wilman; Roebben, G.; Van der Biest, O.; Haukka, S. (2001) -
Determination of degradation products in O3/DI processes
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Development of an aqueous vanadium precursor for the chemical solution deposition of V2O5 films
Peys, Nick; Dewulf, Daan; Schellens, Kevin; Martens, Koen; D'Haen, Jan; De Gendt, Stefan; Hardy, An; Van Bael, Marlies (2010) -
Developments in cleaning technology for critical layers
Heyns, Marc; Arnauts, Sophia; Bearda, Twan; Claes, M.; Cornelissen, Ingrid; De Gendt, Stefan; Doumen, Geert; Fyen, Wim; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Onsia, Bart; Röhr, Erika; Schaekers, Marc; Teerlinck, Ivo; Van Doorne, Patrick; Van Hoeymissen, Jan; Vereecke, Guy; Vos, Rita; Wolke, K. (2000) -
Effective metal gate work function modification by ion implantation with W-based gate stack
Li, Zilan; Schram, Tom; Kerner, Christoph; Witters, Thomas; Singanamalla, Raghunath; Pourtois, Geoffrey; Paraschiv, Vasile; Hoffmann, Thomas Y.; Rohr, Erika; Absil, Philippe; De Gendt, Stefan; De Meyer, Kristin (2008) -
Electrical and physical characterization of MOSFETs with MBE grown La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
Conard, Thierry; Pantisano, Luigi; Claes, Martine; Demand, Marc; Deweerd, Wim; De Gendt, Stefan; Houssa, Michel; Lujan, Guilherme; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Hooker, Jacob; Rittersma, Chris; Fompeyrinne, J.; Loquet, J.P. (2005) -
Electrical characterization of the metal-vanadium dioxide interface and implications for memory applications
Martens, Koen; Radu, Iuliana; Mertens, Sofie; Shi, Xiaoping; Schaekers, Marc; Tielens, Hilde; Huyghebaert, Cedric; De Gendt, Stefan; Jurczak, Gosia; Afanasev, Valeri; Heyns, Marc; Kittl, Jorge (2011) -
Electrochemical characterization of lithiation and de-lithiation of ultra-thin amorphous TiO2 films
Moitzheim, Sebastien; Deng, Shaoren; Huyghebaert, Cedric; Detavernier, Christophe; De Gendt, Stefan; Vereecken, Philippe (2014) -
Evolution of optoelectronic properties of graphene under ozone treatment
Klekachev, Alexander; Cantoro, Mirco; Kuznetsov, Sergey; Heyns, Marc; De Gendt, Stefan; Stesmans, Andre (2011) -
Fabrication and characterization of Si and hetero-junction tunnel field effect transistors
Claeys, Cor; Leonelli, Daniele; Rooyackers, Rita; Vandooren, Anne; Verhulst, Anne; Heyns, Marc; Groeseneken, Guido; De Gendt, Stefan (2009) -
Foton geïnduceerd etsen van koper en vorming van koper nanodraden
Dictus, Dries; De Gendt, Stefan; Vinckier, Chris; Boullart, Werner; Vanhaelemeersch, Serge (2008) -
Gd(III)-Nb(V)-oxides: high-k materials screened by aqueous CSD
Dewulf, Daan; Hardy, An; Van Elshocht, Sven; Adelmann, Christoph; De Gendt, Stefan; Van Bael, Marlies (2010) -
Graphene for microelectronics
van der Veen, Marleen; Soree, Bart; Cantoro, Mirco; Klekachev, Alexander; Nourbakhsh, Amirhasan; Clemente, Francesca; Szepieniec, Mark; Vereecken, Philippe; Stesmans, Andre; Sels, Bert; De Gendt, Stefan; Heyns, Marc (2009) -
Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications
Caymax, Matty; Brijs, Bert; Carter, Richard; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Richard, Olivier; Vandervorst, Wilfried; Zhao, Chao; Maes, Jan; Chen, Jerry; Cosnier, Vincent; Green, Martin; Kaushik, Vidya; Kluth, Jon; Tsai, Wilman (2002) -
Growth of copper and copper compound nanowires
Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Boullart, Werner; De Gendt, Stefan; Baklanov, Mikhaïl; Vinckier, Chris; Vanhaelemeersch, Serge (2008)