Browsing by Author "Aguilera, Lidia"
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Publication Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors
Oral presentation2008, 15th Workshop on Dielectrics in Microelectronics - WODIMPublication Improved characterization of high-k degradation with vacuum C-AFM
Proceedings paper2008, Synthesis and Metrology of Nanoscale Oxides and Thin Films, 22/03/2008, p.1074-I11-02Publication Improved nano-scale characterization of high-k dielectrics with vacuum C-AFM
Meeting abstract2007, Workshop on Scanning Probe Microscopy and Spectroscopy, 26/10/2007Publication Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics
Oral presentation2007, Trends in Nanotechnology conference - TNT 2007Publication Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics
Publication Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Journal article2008, Microelectronics Reliability, (48) 8_9, p.1521-1524Publication Nanoscale and device level electrical behavior of annealed ALD Hf-based gate oxide stacks grown with different precursors
Publication Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment
Proceedings paper2008, IEEE International Reliability Physics Symposium Proceedings - IRPS, 27/04/2008, p.657-658