Browsing by Author "Beckhoff, B."

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Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

Kolbe, M.
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Beckhoff, B.
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Krumrey, M.
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Reading, M.
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Van den berg, J.
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Conard, Thierry
;
De Gendt, Stefan
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.293-300
Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence

Honicke, P.
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Beckhoff, B.
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Kolbe, M.
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List, Scott
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Conard, Thierry
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Struyf, Herbert
Journal article
2008, Spectrochimica Acta B, (63) 12, p.1359-1364
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
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Reading, M.A.
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Parisini, A.
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Kolbe, M.
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Beckhoff, B.
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Ladas, S.
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Petrik, P.
Meeting abstract
2009, 216th ECS Meeting, 4/10/2009, p.1994
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
;
Reading, M. A.
;
Parisini, A.
;
Kolbe, M.
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Beckhoff, B.
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Ladas, S.
;
Fried, M.
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6, 4/10/2009, p.349-361
Investigations of the surface chemical composition and atomic structure of ex-situ sulfur passivated Ge(100)

Fleischmann, Claudia
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Sioncke, Sonja
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Schouteden, K.
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Paredis, K.
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Beckhoff, B.
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Müller, M.
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.421-432
Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation

Kolbe, M.
;
Beckhoff, B.
;
Krumrey, M.
;
Reading, M.A.
;
van den Berg, J.A.
;
Conard, Thierry
Meeting abstract
2009, 216th ECS Meeting, 4/10/2009, p.1975