Browsing by Author "Bleiker, Simon J."

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Integrated silicon photonic MEMS

MORPHIC: MEMS enhanced silicon photonics for programmable photonics

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

Wafer-level hermetically sealed silicon photonic MEMS

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS