Browsing by Author "Chen, Zhijin"
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Publication Advanced PnR Logic Patterning Enabled by High-NA EUV Lithography
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1342410-1Publication EUV based multi-patterning schemes for advanced DRAM nodes
Proceedings paper2022, Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2022, p.Art. 1205503Publication Hotspot discovery and variability analysis for advanced EUV processes
Publication Influence of Wafer Topography on Focus Control and Defectivity in EUV Lithography
Publication Resolution improvement and dose reduction in logic and memory applications from low NA to high NA
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1Publication Wafer Edge Defectivity and Its Correlation to Process Parameters