Browsing by Author "Das, Arabinda"
- Results Per Page
- Sort Options
Publication Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Journal article2002, Microelectronic Engineering, (64) 1_4, p.25-33Publication Characterisation of JSR's spin-on hardmask FF-02
Journal article2003, Microelectronic Engineering, (70) 2_4, p.308-313Publication Comparative Hall studies in the electron - and hole-doped manganites La0.33Ca0.67MnO3 and La0.70Ca0.30MnO3
Journal article2000, Physical Review B, (62) 17, p.11633-11638Publication Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Proceedings paper2002, Proceedings of the IEEE International Interconnect Technology Conference, 3/06/2002, p.51-53Publication Damascene integration feasability of porous SiLK resin films
Proceedings paper2002, Advanced Metallization Conference 2001, 9/10/2001, p.19-24Publication Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Journal article2002, Microelectronic Engineering, (64) 1_4, p.351-360Publication Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
Journal article2003, Microelectronic Engineering, (70) 2_4, p.293-301Publication Influence of the morphology on the magneto-transport properties of laser-ablated ultrathin La0.7Ba0.3MnO3 films
Journal article2001, Journal of Applied Physics, (90) 3, p.1429-1435Publication Post patterning meso porosity creation: a potential solution for pore sealing
Proceedings paper2003, International Interconnect Technology Conference, 2/06/2003, p.242-244