Browsing by Author "Dauendorffer, Arnaud"

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Approaches to Enable Patterning of Tight Pitches towards High NA EUV

Tadatomo, Hiroki
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Dauendorffer, Arnaud
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Onitsuka, Tomoya
;
Genjima, Hisashi
;
Ido, Yasuyuki
Proceedings paper
2022, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2020-2022, p.120560F
Elucidating the role of imaging metrics for variability and after etch defectivity

Franke, Joern-Holger
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Frommhold, Andreas
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Dauendorffer, Arnaud
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Nafus, Kathleen
Journal article
2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 2, p.Art. 023201
EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing

Dinh, Cong Que
;
Nagahara, Seiji
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Kuwahara, Yuhei
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Dauendorffer, Arnaud
;
Yoshida, Keisuke
Journal article
2022, JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, (35) 1, p.87-93
Novel processing technologies for advanced EUV patterning materials using metal oxide resist (MOR)

Onitsuka, Tomoya
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Kawakami, Shinichiro
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Dauendorffer, Arnaud
;
Shimura, Satoru
Proceedings paper
2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116091L
Recent advances in EUV patterning in preparation towards high-NA EUV

Nagahara, Seiji
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Dauendorffer, Arnaud
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Thiam, Arame
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Liu, Xiang
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Kuwahara, Yuhei
;
Dinh, Cong Que
Proceedings paper
2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 124981G