Browsing by Author "Dialameh, Masoud"
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Publication A combined SPM/TOFSIMS tool to obtain real chemical 3D information
Meeting abstract2017, 21st International Conference on Secondary Ion Mass Spectrometry - SIMS21, 10/09/2017, p.304Publication A correlative ToF-SIMS/SPM methodology for probing 3D devices
Journal article2020, Analytical Chemistry, (92) 16, p.11413-11419Publication A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Journal article2021, Microscopy and Microanalysis, (27) S1, p.178-179Publication Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Oral presentation2018, SIMS Europe 2018Publication Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
Oral presentation2019, European Atom Probe Workshop 2019Publication Automated calibration of model-driven reconstructions in atom probe tomography
Journal article2022, JOURNAL OF PHYSICS D-APPLIED PHYSICS, (55) 37, p.375301Publication Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment
Journal article2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 3, p.031010Publication CNT EUV pellicle tunability and performance in a scanner-like environment
Proceedings paper2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090YPublication Development and reference-free characterization of 3D nanostructures as potential calibration sample for analytical techniques
Publication Development and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques
Publication Elastic backscattering during boron implantation in Si1-xGex
Journal article2024, VACUUM, (219) Part A, January, p.Art. 112740Publication Influence of the Emitter Shape on the Field-of-View in Atom Probe Tomography
Journal article2024, MICROSCOPY AND MICROANALYSIS, (30) 6, p.1130-1137Publication Standardized APT tips for interlaboratory studies
Proceedings paper2018, Atom Probe Tomography and Microscopy - APT&M, 10/06/2018Publication Toward a reference sample for atom probe tomography
Proceedings paper2018, Workshop on Reference Nanomaterials: Current Situation and Needs: Development, Measurement, Standardization, 14/05/2018