Browsing by Author "Gijbels, Renaat"
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Publication Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.147-159Publication Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces
Journal article2000, Journal of the Electrochemical Society, (147) 5, p.1915-1919Publication Modeling of bombardment induced oxidation of silicon
Journal article2001, Journal of Applied Physics, (89) 5, p.3001-3011Publication Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Oral presentation1997, SIMS XI; 8-12 September 1997; Orlando, Calif., USA.Publication Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Proceedings paper1998, SIMS XI - Secondary Ion Mass Spectrometry, 8/09/1997, p.327-330Publication SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding
Journal article2000, Surface and Interface Analysis, (29) 11, p.761-765Publication Study of oxynitrides with dual beam TOF-SIMS
Proceedings paper2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.611-614Publication TOF-SIMS artifact in the analysis of ZrO2/SiO2/Si stacks
Oral presentation2001, 13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.Publication XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
; ; ; ; Verheyen, P.Oral presentation1998, International Vacuum Congress (IVC-12); 31 August - 9 September 1998; Birmingham, UK.Publication XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
; ; ; Journal article1999, Thin Solid Films, 343-344, p.583-586Publication XPS study of ion induced oxidation of silicon with and without oxygen flooding
Proceedings paper2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.73-76