Browsing by Author "Gromova, Maria"
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Publication Feasibility study of using non-released poly-SiGe bolometers as fingerprint sensors
Proceedings paper2005, 16th MicroMechanics Europe Workshop - MME, 4/09/2005, p.374-377Publication Highly reliable and extremely stable SiGe micro-mirrors
Proceedings paper2007-01, Technical Digest 20th IEEE International Micro Electro Mechanical Systems Conference - MEMS, 21/01/2007, p.759-762Publication Microcrystalline silicon germanium for MEMS applications
Gromova, MariaPHD thesis2007-06Publication Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures
Proceedings paper2004-01, 17th IEEE International Conference in Micro Electro Mechanical Systems - MEMS, 25/01/2004, p.721-724Publication Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS
Proceedings paper2005, Proceedings 13th International Conference on Solid State Sensors, Actuators and Microsystems - TRANSDUCERS, 5/06/2005, p.1326-1329Publication Poly SiGE microbolometer arrays
Oral presentation2002, Workshop on Uncooled Infra-Red Detector TechnologiesPublication Poly-SiGe, a superb material for MEMS
Proceedings paper2004, Micro- and Nanosystems, 1/12/2003, p.25-36Publication Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Proceedings paper2008, Passive and Electromechanical Materials and Integration, 24/03/2008, p.1075-J05-02Publication The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
Journal article2004, Microelectronic Engineering, (76) 1_4, p.266-271