Browsing by Author "Hartwich, J."
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Publication Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
Proceedings paper2003, Proceedings 33rd European Solid-State Device Research Conference - ESSDERC, 16/09/2003Publication Fabrication and characterization of full diamond tips for scanning-spreading resistance microscopy
Journal article2004-06, Microelectronic Engineering, 73-74, p.910-915Publication High resolution 2D scanning spreading resistance microscopy (SSRM) of thin film SOI MOSFETs with ultra short effective channel length
Publication High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Meeting abstract2003, 7th International Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, 27/04/2003, p.184Publication High-resolution scanning spreading resistance microscopy of surrounding-gate transistors
Publication Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
Journal article2003, Microelectronic Engineering, 67-68, p.945-950Publication Scanning spreading resistance microscopy of fully depleted SOI devices
Publication Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips
Journal article2003, Applied Physics Letters, (82) 11, p.1724-1726Publication Two-dimensional carrier profiling in advanced devices with pico-meter resolution
Proceedings paper2004, Proceedings Ultimate Integration of Silicon (ULIS) Workshop, 11/03/2004, p.63-67