Browsing by Author "Hasan, Mahmudul"
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Publication 34 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask Geometries
Proceedings paper2024, 2024 Conference on Photomask Technology, 2024-09-29, p.132161NPublication Addressing Integration Challenges in Direct Backside Contact of CFET
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication Chip-based super-resolution structured illumination microscopy
Proceedings paper2020, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 6/04/2020, p.113641FPublication Direct correlation between mask registration and on-wafer measurements for individual logic device features
Proceedings paper2022, Photomask Technology Conference, SEP 26-29, 2022, p.Art. 122930LPublication Enabling metrology and inspection for CFET structures using hybrid qualification approaches
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-26, p.1398109Publication Extreme contact shrink for back end of line connectivity
Journal article2022, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, (40) 3, p.032803Publication Extreme-Ultraviolet-Lithography Line-Space Patterning Defect Detection Using Voltage Contrast SEM
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134260P-1-134260P-7Publication High NA: Enabling Single Exposure for Metal Logic Designs
Proceedings paper2026, Optical and EUV Nanolithography XXXIX,, 2026-02-22, p.139791EPublication Influence of photoresist thinning and underlayer film on e-beam using eP5 for High-NA patterning
Proceedings paper2022, International Conference on Extreme Ultraviolet Lithography, SEP 26-29, 2022, p.122920MPublication Litho Process Development for Pillars to Enable High Density 4F2 Memory Cells at 34nm Pitch
; ; ; Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275004Publication Metrology of Thin Resist for High NA EUVL
Proceedings paper2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.12053OOPublication Module-level cell processing of silicon heterojunction interdigitated back-contacted (SHJ-IBC) solar cells with efficiencies above 22%: Towards all-dry processing
Proceedings paper2016, 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC), 5/06/2016, p.1182-1187Publication Module-level cell processing of silicon heterojunction interdigitated back-contacted (SHJ-IBC) solar cells with efficiencies above 22%: Towards all-dry processing
Proceedings paper2016, 43rd IEEE Photovoltaic Specialists Conference - PVSC, 6/06/2016, p.1-6Publication Selective deposition of a-Si:H: a proof-of-concept study
Proceedings paper2018, 7th World Conference on Photovoltaic Energy Conversion - WCPEC-7, 10/06/2018, p.3148-3151Publication Silicon heterojunction interdigitated back-contact solar cells bonded to glass with efficiency >21%
Journal article2017, Solar Energy Materials and Solar Cells, 165, p.82-87Publication Silicon solar cells on epitaxial foils
Meeting abstract2016, Euroregional Workshop on Photovoltaics & Nanophotonics, 21/09/2016Publication Supercritical angle fluorescence characterization using spatially resolved Fourier plane spectroscopy
Journal article2018, Analytical Chemistry, (90) 7, p.4263-4267