Browsing by Author "Heyne, Markus"

A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion

An experimental study of VUV plasma damage on porous organo-silicon glass materials

Atomic layer deposition of 2D transition metal dichalogenides

Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures

Atomic layer etching of amorphous silicon with selectivity towards MoS2

Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts

Atomic layer processing of 2D materials for beyond CMOS applications

BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides

Characterization of grain boundaries and impact of plasma-induced patterned in 2D materials

Chemistry and plasma physics challenges for 2D materials technology

Comparative study of the growth behaviour of 2D WS2 by Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), and the impact on the 2D crystal structure

Controlled sulfurization process for the synthesis of large area MoS2 films and MoS2-WS2 heterostructures

Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials

Effect of 147 nm radiation on a 2.0 porous organo-Silicon glass

Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

Growth of multilayer transition-metal dichalcogenide layers by high temperature sulfurization in H2S

Highly efficient and stable MoS2 FETs with reversible n-doping using a dehydrated poly(vynyl-alcohol) coating

Improved plasma resistance for porous low-k dielectrics by pore stuffing approach

Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition