Browsing by Author "Holländer, B."

Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM

He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles

Improvement of He ion induced SiGe layer relaxation by a thin Si:C layer

In-situ TEM on He implantation induced defects in SiGe/Si

Strain relaxation of pseudomorphic Si1-xGe/Si(100) heterostructures after Si+ ion implantation

Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation

Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

Strained Si on relaxed SiGe made by ion implantation and strain transfer

Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique

Tensely strained silicon on SiGe produced by strain transfer

The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates

Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing