Browsing by Author "Hong, Sung Eun"
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Publication Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns
Meeting abstract2015, 41st International Conference on Micro- and Nanofabrication - MNE, 21/09/2015, p.Wed-A6-c1Publication Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices
Oral presentation2016, SPIE Advanced Lithography ConferencePublication DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
; ; Publication Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Journal article2015, Journal of Vacuum Science and Technology B, (33) 6, p.06F301Publication Influence of template fill in grapho-epitaxy DSA
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 22/02/2016, p.97791GPublication Influence of template fill in graphoepitaxy directed self-assembly
Journal article2016, Journal of Micro/Nanolithography MEMS and MOEMS, (15) 3, p.31603Publication Towards cost-effective and low defectivity DSA flows for line/space patterning
Proceedings paper2015, 1st International Symposium on DSA, 25/10/2015